Used GASONICS / NOVELLUS L 3510 #9299008 for sale

GASONICS / NOVELLUS L 3510 etcher/asher is a powerful, high-performance tool designed for high-volume and high-throughput process steps. The equipment utilizes advanced etching technology to deliver superior performance and accuracy. Its patented gas delivery system and high efficiency filters ensure optimal process conditions, while its sophisticated software and multiple-language support ensure the utmost control and flexibility in a production environment. The unit includes a multi-gas delivery module, comprising of an Air/Nitrogen purge, a vacuum interface and four gas delivery lines for process delivery. The machine also features a patented Mix Boost dilution process for greater immersion control, a patented auto-replenishing algorithm for reduced downtime, as well as an advanced ion stream for contaminant control. Additionally, its modular design facilitates easy integration into existing process lines, with an optional RF module for operating in ultra-low kV applications. GASONICS L 3510 etcher offers precision gas mixing and a patented air-gas purging tool that monitors and compensates gas deposition while minimizing particle contamination. Its advanced configuration tools support process parameters including speed, selectivity, orientation and etch depth, and instrumentation is provided for process control and data collection. The platform also supports a wide range of specialty applications, with the ability to configure and control multiple quench gas solutions, including reactive etching, gas removal and plasma cleaning. NOVELLUS L 3510 is compatible with existing etching processes, and its modular architecture ensures easy integration into existing production lines. A wide range of interfaces are supported, and an open-platform software suite provides low-overhead automation solutions for even greater process accuracy and speed. Built to last, L 3510 is backed by a three-year hardware and software warranty. All of these features combine to make GASONICS / NOVELLUS L 3510 etcher/asher an ideal solution for high-throughput, high-volume processing.