Used GASONICS / NOVELLUS L 3510 #9299009 for sale

GASONICS / NOVELLUS L 3510 is a sophisticated etching and ashing equipment designed to handle wafer processing with advanced accuracy, control, and throughput. It features a three-stage architecture that allows for advanced etching and ashing operations with low to moderate die selectivity. GASONICS L 3510 is ideal for etching and ash deposition at a thickness of up to 0.45 microns. The system is equipped with an advanced control console for precise operation and monitoring of the etching/ashing process. It uses real-time process data to ensure the highest possible performance. This touch-screen console is user friendly and provides an easy-to-use interface to help with programming of tasks. The unit features a patented four-quadrant gas delivery machine that permits precise etching and ashing over wide areas. This tool uses two ports; one supplying low pressure, one supplying high pressure. Flow tends to remain even and uniform in both directions and background pressure can be adjusted accordingly. In addition, the asset has a built-in rapid thermal processing unit that allows for the rapid thermal annealing of a number of materials. This is especially useful for the processing of wafers with different stepped designs. The RTP unit operates in both pulse and constant heat mode to provide precise temperature control. NOVELLUS L 3510 also has an integrated vacuuming mechanism which uses a multi-stage vacuum model that ensures excellent wafer handling and process control. This includes a vacuum source, gate valve, and a controller for precise control of the vacuum pressure. Finally, the equipment has a laser assisted scan sensor that is used for precise alignment and movement of the wafer. This allows the wafer to be moved easily and quickly from one etching location to the next. The laser assisted scan sensor also enables precise adjustment of the etching and ashing angle for optimum etching and ashing performance.