Used GASONICS / NOVELLUS L 3510 #9299010 for sale

GASONICS / NOVELLUS L 3510 is an etching and ashing equipment for semiconductor fabrication. This environmentally friendly system is designed to provide precise, high-quality lithography in accordance with industry standards and performance requirements. With its advanced lateral current etching and ashing technology, GASONICS L 3510 delivers maximum etching passivation and uniformity on as small as 0.35μm features through bottom anti-reflective coating. Its on-board carrier management provides precise in-object etching control and features a front-side panel which eliminates the need for a separate computer controller. NOVELLUS L 3510 is a modular unit compatible with applications such as high aspect ratio, high selectivity etching, and fine feature trim. It offers up to 1,500W of power for etching, and up to 600W for ashing for increased throughputs of large and small feature sizes. The machine also features a variable-intensified electron source that enables optimum performance for wide-line applications and high productivity processes. Additionally, L 3510 includes advanced diagnostics for maximum tool insight and control, as well as its advanced Endura software for increased process control. The Endura software allows for efficient use of the asset and process optimization. It also offers comprehensive process management and secure data recording capabilities, making the model both versatile and useful. GASONICS / NOVELLUS L 3510's intuitive user interface and real-time chamber diagnostics with full-color chamber illustrations also adds to its usability. In all, GASONICS L 3510 is an advanced, reliable etching and ashing equipment that provides precise lithography performance. It is ideal for the semiconductor industry and its forward-thinking design is a great choice for those looking for reliable and efficient lithography performance. With its plug and play setup and easy-to-use features, NOVELLUS L 3510 is a great choice for those looking for an etching and ashing system.