Used GASONICS / NOVELLUS L 3510 #9299011 for sale

GASONICS / NOVELLUS L 3510 is an advanced etcher / asher equipment designed to provide high-quality etching solutions for a variety of applications. It features a state-of-the-art gas/liquid delivery system specifically designed to allow a wide range of chemicals and gases to be used. The unit can be configured to deliver precisely controlled liquid or gas flows at different pressures and temperatures. GASONICS L 3510 can process semiconductor wafers up to 200 mm in diameter. It includes a single wafer cassette and multiple transport modules to move the wafer from inside to outside the process chamber. The machine uses a Ponderomotor-Controlled plasma source to etch defect-free material with high selectivity. This plasma source can be tuned to several different frequencies to etch different types of materials. The tool is also equipped with several other advanced features, such as a high-power RF generator, multiple independent zone temperature control, real-time wafer flatness measurement, an advanced vector ion source and an integrated plasma source. It also comes with a powerful software package that allows users to easily monitor and modify parameters such as power, temperature, gases and chemicals during etching processes. To ensure superior etching performance, the asset is designed with several safety features, such as emergency open/close capabilities, overpressure and collision protection, a variable pressure safety valve and emergency gas shutoff. NOVELLUS L 3510 can quickly and precisely etch various materials, including dielectrics, metals and polymers. Its high-precision etching capabilities can help maximize the performance of semiconductor devices and improve yields in production. It is a reliable, sophisticated etching solution for high-volume, high-precision operations.