Used GASONICS / NOVELLUS L 3510 #9299012 for sale

GASONICS / NOVELLUS L 3510 is a plasma etcher designed to accurately and efficiently etch materials such as metals, metals alloys, SiO2, TiO2, and SiN. It has a highly reliable RF design with advanced process control algorithms thanks to its open architecture. This enables it to enable processes that require a high degree of precision and flexibility. GASONICS L 3510 offers state-of-the-art etching process control and metrology capabilities. NOVELLUS L 3510 uses both high frequency and low frequency radio frequency to follow a patterned wafer to precisely create or modify its surface. It is also equipped with an advanced differential mobility analyzer that is used to measure the electron energy distribution of etching ions during the etching process and adjust the plasma to obtain a desired result. This helps ensure that the plasma does not etch the wafer too deep or too thinly, which could damage or degrade the device or substrate being etched. L 3510 is equipped with a chamber that is capable of operating in both In-situ and ex-situ modes. In-situ processes are typically used in the manufacture of highly precise parts where the process chamber can be used to make modifications to the device while it is being processed. In ex-situ processes, the chamber is used to apply treatments and coatings to the device or substrate once it has been removed from the chamber. This offers faster and more accurate processes with a reduced chance of contamination. GASONICS / NOVELLUS L 3510 utilizes a computer-controlled software interface to enable full control over the process parameters and equipment setup. It also features a modular design which allows users to easily add features and make upgrades. This makes GASONICS L 3510 a very versatile etching system able to handle a variety of etching and cleaning jobs. NOVELLUS L 3510 is also fitted with a number of safety features which ensure that the unit is operating safely. This includes a built-in over-pressure protection machine which shuts off the power in the event of a sudden pressure increase. Additionally, the tool is equipped with an alarm asset which can detect specific process problems and make corrections automatically. L 3510 is highly efficient and reliable etching model designed to help you achieve reliable and high-quality results. With its advanced features and expansive capabilities, this equipment is sure to provide users with a reliable and accurate etching process.