Used GASONICS / NOVELLUS L 3510 #9299013 for sale

GASONICS / NOVELLUS L 3510 is an advanced-level etcher/asher capable of performing complex patterning processes on a wide range of materials at a high rate of speed. This 400 mHz equipment is designed specifically for multi-treatment, multi-level patterning applications, including those in the semiconductor, optoelectronics, chemical-mechanical polishing, and biomedical industries. GASONICS L 3510 is designed and manufactured using advanced, state-of-the-art etching/ashing technologies, ensuring accuracy and repeatability of results. The system is equipped with a wide range of advanced parameter optimization capabilities, allowing precise control of parameters and resolution. The unit also benefits from an on-board, high-resolution imaging machine to ensure precise patterning and consistent results. NOVELLUS L 3510 includes four wafer carriers and interface programs, precisely controlling wafer orientation and management. The tool is equipped with a software-controlled cassette lift asset for both loading and unloading of substrates. L 3510 features an automated shutter model for precision control of the etching and ashing processing parameters. In addition, the equipment includes an independent wafer loadlock chamber with a rotating turntable, enabling clean application and removal of etching and ashing media with no exposure to the external environment. GASONICS / NOVELLUS L 3510 further offers a variety of other options, including an advanced Graphics User Interface (GUI), real-time monitoring and control capabilities, a close-coupled boat, and temperature control chambers. Overall, GASONICS L 3510 is a powerful etcher/asher whose range of advanced technologies make it a valuable option for industries in need of complex, high-precision patterning processes. It is designed to provide users with highly accurate, repeatable results in a fraction of the time it would take with conventional etching and ashing tools.