Used GASONICS / NOVELLUS L 3510 #9308469 for sale

GASONICS / NOVELLUS L 3510 is a high-speed etcher and asher used for a wide range of wafer processing applications within the semiconductor industry. This equipment uses advanced technologies such as atmospheric pressure chemical vapor deposition (APCVD) and sequential plate rotary etching (SPRE) to process wafers at high speeds. GASONICS L 3510 has a wide range of capabilities, including depositing oxide, nitride, and polysilicon coatings onto silicon wafers, etching complex patterns and structures, and removing unwanted material from the wafer surface. NOVELLUS L 3510 offers high-speed performance and reliable operation. The system has a working speed of up to 50 wafers per hour and is capable of controlling up to six separate chambers. It can also handle wafers of various diameters (8" to 12"). The machine has automatic chamber purging and process liquid management capabilities, ensuring a clean work environment and consistent results. The unit is equipped with a rugged robotic arm and motion control machine, allowing for fast and accurate calibration of the etching and ashing process. L 3510 uses a wide range of advanced tools and technologies, such as ultra-violet and electron beam lithography, sequenced gas introduction, and plasma source technology. The tool is equipped with advanced safety features, such as automatic software protection, to ensure a safe working environment. Moreover, users can monitor process parameters and production in real time, enabling optimal control of the process. GASONICS / NOVELLUS L 3510 offers several benefits for semiconductor manufacturers. Its advanced process control capabilities and the high-speed performance allow for improved cycle times and yields, resulting in increased productivity and better yields. Moreover, GASONICS L 3510 is equipped with advanced safety features, ensuring a safe work environment. Furthermore, the asset has a low cost of ownership and is designed for high reliability. In conclusion, NOVELLUS L 3510 is a state-of-the-art etcher and asher ideal for the semiconductor industry. The high-speed and reliable model provides a wide range of capabilities and features and is capable of controlling up to six chambers. L 3510 is highly reliable, cost-effective, and offers improved cycle times and yields, making it a great choice for semiconductor manufacturers.