Used GASONICS / NOVELLUS L 3510 #9373158 for sale

GASONICS / NOVELLUS L 3510 is a plasma etching equipment that is used to create fine structures on substrates for the fabrication of integrated circuits and other electronic components. It is based on the method of using reactive gases to form a plasma for etching or reactive-ion etching (RIE). This process is used to create structures on the surface of substrates including metal, silicon, quartz, and ceramic. The main features of GASONICS L 3510 are its ability to etch very fine and precise features due to its flexibility in controlling the parameters of etching, including the etch rate, etch depth, and feature size. This enables etching with high accuracy and precision. NOVELLUS L 3510 has less than 1 mm etch depth accuracy, 50 mm × 50 mm (2" × 2") field size, and an etch rate of 1-10 nms. Additionally, the system features a step-tuning fuel optimizer, which reduces the time and cost of etching. L 3510 also has increased safety features that make it suitable for a range of industrial applications, including high-performance materials like silicon carbide and diamond-like coatings. These include a furnace-enclosed RF chamber, an exposed inner wall for easy cleaning, and a HEPA filter that captures hazardous particles. The unit is ideal for an industrial environment due to its stainless steel construction and the ability to be operated remotely. In terms of its operational parameters, GASONICS / NOVELLUS L 3510 has a substrate temperature capability of up to 700 °C and a pressure range of 1.1-10.0 mbars. The machine also supports a variety of process gases including chlorine, fluorine, argon, nitrogen, or combinations of these. It also features a gas control pedestal, which permits ease of access to the gas distribution tool as well as enabling precise gas control. Finally, GASONICS L 3510 is equipped with an intuitive touchscreen interface, allowing users to monitor and control the etching processes. The asset also includes a data logger which provides detailed etching reports and process records. Overall, NOVELLUS L 3510 is an efficient, accurate, and user-friendly etcher that is suitable for a variety of industrial applications.