Used GASONICS / NOVELLUS L 3510 #9387796 for sale

GASONICS / NOVELLUS L 3510 is a state of the art Dry-Etching/Ashing tool. This unit is designed to precisely etch and ashing semiconductor substrates by using a combination of plasma etching and etching gases. This equipment is capable of producing very fine features and details on a variety of substrates such as silicon, III-V compounds, or any other semiconductor material. The advanced etching and ashing capabilities of GASONICS L 3510 helps create very crisp and well defined features on the substrate surfaces. The system is equipped with a number of powerful capabilities that are designed to help maximize etching and ashing accuracy and performance. The main contentions of NOVELLUS L 3510 are the gas delivery unit, which allows for precise control over the etching environment, adjusting the pressure, temperature and composition of the gases during etching, helping minimize contamination and maintain uniformity. Additionally, the gases used during etching and ashing can be changed depending on the type of substrate being processed, tailoring the etching parameters to a particular material. L 3510 also has an advanced plasma source which helps to remove any contaminants from the substrate surface, ensuring a perfectly smooth and planar surface before etching and ashing. The etching and ashing process is performed under a vacuum environment, with the optional ability to use a low-pressure Nitrogen (LPN) chamber to help purge any harmful residues or contaminants from the etching chamber. GASONICS / NOVELLUS L 3510 can also be used to perform advanced thermal treatments such as Rapid Thermal Processing (RTP), if needed for substrate surface refinement or removal of contaminants. The package is highly automated, allowing for the setup and operation of GASONICS L 3510 to be completed quickly and efficiently. It also supports a wide number of recipes that can be programmed allowing for an increased degree of control over the etching and ashing process. The machine is easy to use and its production-grade features make it a cost-efficient tool for a variety of etching and ashing processes. NOVELLUS L 3510 is also supported by a world-wide network of qualified application experts, helping ensure optimal etching and ashing performance.