Used GASONICS / NOVELLUS L 3510 #9400257 for sale

GASONICS / NOVELLUS L 3510 is an etcher/asher that can be used to transfer layers from a silicon wafer to a thin film substrate. This device is designed for high-precision window and surface profile forming, and it is compatible with a variety of etch and deposition chemistries. It is an excellent choice for micro- and nanoscale processing, and can be used in processes such as photovoltaic cell manufacturing, chemical/gas sensing, and MEMS/NEMS technologies. GASONICS L 3510 is equipped with a variety of features that make it a desirable option for etching and ashing. It features an advanced optical window assembly with an integrated focus control, a modular design that can be easily configured to meet application needs, a dual beam column architecture, and a robust high-density power supply equipment. The device also has a range of environmental control parameters, including advanced gas purging and vacuum systems, temperature geocorrelation, and coolant treatment for a safe and reliable operation. Additionally, the device is equipped with a direct write system that can achieve a precision of up to 50nm, allowing for extremely precise results. In terms of performance, NOVELLUS L 3510 is designed for maximum accuracy and flexibility. It is capable of operating at a vacuum level as low as 10e-6 Torr, with a deposition rate of up to 200 A/min and etch rate of up to 20 mA/cm2. It features a DC power supply unit that can operate at up to 600V and up to 5kW. Further, the device is also equipped with a range of diagnostic tools, including a sensitive beam current meter, a visibility monitor, and a gas sensor. L 3510 is easy to maintain and service. The device is fitted with a range of monitoring parameters and adjustable operating mode controls, which allow for easy diagnostics and troubleshooting. Additionally, the device is fitted with a range of safety features, including a self-diagnostic machine for an enhanced performance. The device is also compatible with a range of compatible consumables, enabling an easy replacement and clean room operation. In conclusion, GASONICS / NOVELLUS L 3510 is an advanced etcher/asher designed for high-precision window and surface profile forming processes. It is equipped with a variety of features that make it an excellent choice for micro- and nanoscale applications, while also providing a reliable and safe operation. In terms of performance, the device is capable of high levels of accuracy and offers a range of adjustable parameters. And with its easy maintenance and serviceability, GASONICS L 3510 is an ideal choice for etching and ashing processes.