Used GASONICS / NOVELLUS L 3510 #9411534 for sale
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ID: 9411534
Vintage: 2000
Asher
Photoresist strip
Substrate size: 3"-8"
Footprint: 30"
Main frame:
Aluminum chamber
Quartz chamber
Wafer cooling station with PCW
Platen and lamp heating (Flexibility)
Reliable endpoint detection
Z-Bot station (Robot)
Load cassettes elevator
DC Power supply: -5, +5, -12, +12 VDC
(2) DC Power supplies: +5, -15, +15, +24 VDC
I/O Board
Distribution board
Display board
Graphics control board
Hard Disk Drive (HDD)
Floppy Disk Drive (FDD), 3.5"
Microwave generator: 2.45 GHz, 1250 W
Interlock wafer transport
Microwave power supply
Gas flow controller
Visual alarm indicator lamp
Quartz gas distribution shower heads
Radiant heating plate
UV Lamp
End point detection
Plasma system controller
Tolerance limit alarm (pressure, flow, lamps)
Gas handling module and control features
(3) Gas lines with purge:
O2 MFC
(2) N2 MFC
Stainless steel valves gas line
Solenoid control: 24 VDC
Soft pump to limit chamber turbulence
AC Power box
Circuit breaker: 30 Amp
Remote option connector
EMO Control to master system
Circuit breaker
Magnetron
Schematic display driver
Process kits
Panel included
Manuals included
Power supply: 200-240 VAC, 50/60 Hz, Single phase, 30 A
2000 vintage.
GASONICS / NOVELLUS L 3510 is a state-of-the-art etcher/asher equipment designed to provide maximized throughput and total process control in production environments. The system is a self-integrated platform, featuring high-end laser control and software solutions to identify, measure, and modify etch and asher parameters according to specific needs. The innovative features and performance of GASONICS L 3510 Etcher/Asher are unmatched. Laser-based technology ensures maximum accuracy and precision in the fabrication of even the most intricate of devices. Furthermore, the unit is compatible with various substrate materials and various technologies, ranging from thin-film formulations and advanced dielectric layers to etching and ashing of optical materials such as sapphire and silicon oxide. NOVELLUS L 3510 is built on a robust, industrial-grade platform, making it suitable for demanding production cycles. Its large, 15-inch deck allows for quick disconnections and modular add-ons, so the machine can quickly evolve to match changing production requirements. The tool also comes equipped with monolithic linear resonant actuators that minimize drift over large batches of substrates, ensuring evenly distributed results and maintaining consistent etch parameters. The asset's software platform itself is designed to make every aspect of etching easier. The user interface allows for total control over the entire process, including the step-by-step response of the laser and simultaneous control of multiple resonators. Additionally, the software allows for individualized process monitoring, configuration control, and external feedback for quick and precise process adjustments. Overall, L 3510 Etcher/Asher is a best-in-class model that guarantees reliable, repeatable results in a wide range of production processes. The high-precision laser control, integrated hardware platform, and comprehensive software suite ensure the utmost accuracy and control for demanding etch and ashing operations.
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