Used GASONICS / NOVELLUS PEP 3010A #293824443 for sale
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GASONICS / NOVELLUS Aura 3000 is an advanced etcher/asher machine that uses advanced technologies such as Digital Imaging Processing (DIP) and Seamless Layer Processing (SLP) to create precise features and surfaces in a wide variety of materials. The system is highly accurate and suitable for high precision, high-speed manufacturing applications. The machine offers two different chamber options, including an ICP chamber and a large, Diamond-Hard chamber with integrated motion stages for multi-wave motion and adjustable etch angles. GASONICS Aura 3000 offers three independent DIP sources, including an RF generator, microwave generator, and a variable arc plasma generator. These independent sources ensure the highest quality of etching. The machine also has three independent isolators for the independent DIP sources so that no contamination occurs during the etching process. NOVELLUS Aura 3000 also offers laser detectors to identify critical features in the material to be etched. This allows for more precise etching, as well as ensuring a smooth surface finish and decreasing material wear. In addition, the machine also contains integrated vision cameras, which help the system to align and monitor the etching process. Aura 3000 also contains an array of process control feedback tools, which make etching processes easier to manage and more accurate. These feedback tools monitor the process to ensure that precise conditions are maintained through every phase of the etching cycle. In addition to these process control features, GASONICS / NOVELLUS Aura 3000 also contains advanced control features such as rapid etch rates, pulse-width scanning, segmented scans, and deferred commands. These advanced control features give users complete control of the etching process and make etching highly efficient. Finally, GASONICS Aura 3000 is built for long-term durability in harsh production environments. It is designed to stand up to constant use and is built with corrosion-resistant stainless steel. This ensures that the machine will maintain its precise accuracy for a long time and will work reliably in the most extreme production conditions. Overall, NOVELLUS Aura 3000 is a powerful and dependable etch/ash machine that offers professional-grade features, performance, and accuracy. Its advanced features, controls, and built-in reliability make it a top choice for high-precision, high-speed etching and ashing applications.
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