Used GASONICS / NOVELLUS PEP 3010A #293824576 for sale
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GASONICS / NOVELLUS PEP 3010A is a cost-effective plasma etcher and asher used to create a variety of geometrical shapes and patterns on a substrate. It utilizes a chamber that is vacuum sealed and contains multiple electrodes in order to create a plasma state. GASONICS PEP 3010A has the advantage of precisely-controlled energetic reactive ion beams which can be used to etch, deposit, and deposit/etch simultaneously. In addition, the asher can etch a variety of materials including aluminum, copper, tungsten, gallium arsenide, and polysilicon. NOVELLUS PEP 3010A plasma etcher and asher features a three-shaft bridge mounted rotary valve to reduce particle and wafer breakage. This three-shaft design produces accurate and repeatable results on any substrate. Additionally, the etcher and asher include a high frequency AC power supply to produce a stable power source. This ensures efficient operation and minimal maintenance. PEP 3010A also has independent temperature and pressure controllers that maintain the optimal environment inside the chamber. This reduces system downtime and mechanical wear-and-tear. GASONICS / NOVELLUS PEP 3010A is a flexible system that can be programmed to etch various shapes and patterns. It also offers a wide range of settings for mask size, etch depth, anisotropic etch, and rapid etch. This allows users to customize their process for their particular application. Additionally, the etcher and asher utilize a low-voltage glow discharge for precise, efficient processing of substrates. GASONICS PEP 3010A is ideal for production environments that require cost-effective high precision etching and ashing. It offers a reliable and accurate etching process and has the additional benefit of a low cost of ownership. NOVELLUS PEP 3010A is a valuable tool for creating intricate geometrical patterns and shapes on substrates.
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