Used GASONICS / NOVELLUS PEP 3010A #293824582 for sale
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GASONICS / NOVELLUS PEP 3010A is an etcher and asher equipment that utilizes a sequenced set of physical and chemical processes to achieve the fabrication of complex shapes on circuit boards and semiconductor components. It is equipped with a high-resolution beam of plasma from a nitrogen-oxygen mixture that is focused on the target area, providing high precision imaging of the desired pattern. This system is capable of achieving repeatable and repeatable processes with precision down to 0.02 μm, up to three times higher than the industry standard. GASONICS PEP 3010A can be configured for a variety of sub-micron processes such as stepper lithography, dry etching, sputter deposition, and focalized ion, and plasmaImplanted ion beam. Additionally, NOVELLUS PEP 3010A is capable of performing both surface etching and the deposition of conductive metal layers to build complex integrated circuit structures. It is equipped with a multi-directional beam deflection station that directs the plasma beam, allowing plasma driven lithography at 0.02 microns. PEP 3010A has an integrated plasma supply unit, designed to ensure the necessary gas supply at the required pressure and flowrate for efficient processing. It is also equipped with a closed-loop controller that constantly monitors and adjusts the optimization of gas flow rates and gas composition. It is also designed with a micro-aspiration systems, which allows precise control of the etch and sputter rates, and the exact timing of the metal deposition layer. The machine is also designed with an automated end-point sensing tool that allows the required etch rate and the layer thickness to be precisely controlled. This asset continuously monitors the etching process and signals when the desired profile and layer thickness have been achieved. Additionally, GASONICS / NOVELLUS PEP 3010A is equipped with an advanced diagnostic model with fast ad accurate fault detection and automatic recovery. A complete set of tools that allow for easy and reliable maintenance completes the package. GASONICS PEP 3010A has been designed to meet the most challenging etching requirements of today and offers flexibility and precision that is required for the most advanced processes. The combination of precise imaging, fast and accurate end-point sensing and automated maintenance, make NOVELLUS PEP 3010A the ideal solution for any etching and sputtering application.
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