Used GASONICS / NOVELLUS PEP 3500 #9202560 for sale

GASONICS / NOVELLUS PEP 3500 is a state-of-the-art etcher/asher offering superior performance and process flexibility for substrates up to six inches in diameter. It can process wafers with an alumina or quartz PETR in a single step. GASONICS PEP 3500 features a low chamber gas flow design, enabling extended runs with fine point and gap fills as well as complex structures. It has independently controlled electron beam guns for tighter process control. Each gun is programmable up to 500 watts power and can move over the substrate at speeds of up to 40 inches per minute. The beam gun is integrated into a modular, full-field, magnetized source holder providing flexibility in source selection and allows for a wide range of material etching and ashing requirements. Its optimized pressure control system maintains superior base pressure levels during processing. For enhanced safety, the entire chamber is made of stainless steel and is designed for long-term operation in an industrial setting. The system also features a cooling system to prevent heat buildup and protect the substrate during processing. NOVELLUS PEP 3500 is equipped with multi-level security measures and is compliant with the requirements of safety analysis and/or occupational health and safety management systems. Additionally, the on-board, high-speed maintenance scheduler allows for proactive and preventive maintenance measures. All in all, PEP 3500 etcher/asher provides superior performance and process flexibility, making it the ideal choice for any semiconductor etching application.