Used GASONICS / NOVELLUS PEP 3510 Plus #293794156 for sale

GASONICS / NOVELLUS PEP 3510 Plus is a multi-purpose etching and ashing equipment. It is a highly automated, highly flexible, and easy-to-use system that diffuses, implants, etches, and processes substrates. It has a stage with a fully automatic substrate exchange unit that continuously loads substrates from up to four source cassettes. The machine provides maximum flexibility by varying the asher and etcher modes, chamber configurations, and substrate diameters. The tool also allows for fast load cycle time, thereby reducing downtime. The asset also comes with a high-temperature etching chamber and an asher chamber. A large Monochloro-Silane nozzle is used to supply low-temperature uniform reactive gases during etching and ashing. The nozzle is equipped with an adjustable gas delivery model that allows for uniform gas distribution over the entire substrate. GASONICS PEP 3510 Plus also has a direct-drive control equipment for higher process control accuracy. The system also features an omnidirectional wafer motion control unit which is designed to reduce substrate distortion and vibration. The modular machine allows for a wide range of process recipes that can be stored and retrieved from memory. Users can create recipes for etching, ashing, and other front-end or back-end process steps. The tool also includes a Computer Aided Process Engineering (CAPE) software package that enables users to program the asset for specialized processes. The model is designed to provide high throughput, low particle collisions, and low power consumption. It is also designed to operate in low-vacuum or high-pressure environments, making it highly suitable for various applications including wafer fabrication, semiconductor device fabrication, disk drive fabrication, and MEMs fabrication. NOVELLUS PEP 3510 Plus is an ideal equipment for labs or production environments. It is built with a high-quality set of components that makes it reliable, durable, and cost effective.