Used GASONICS / NOVELLUS PEP 3510 #293587292 for sale

GASONICS / NOVELLUS PEP 3510 is a state-of-the-art etcher/asher. This chamber is designed for use in production environment and holds up to five process chambers and one or two pre-clean chambers depending on the configuration. This advanced tool is capable of executing single wafer as well as batch processing of multiple wafers. GASONICS PEP 3510 features an Iontek upgrade that allows for precision ion implantation. It has an interchangeable source chamber with a source rotation defense equipment and a 7x10 force sensor to measure uniformity of implantation. The substrate support chamber has integrated raised elevators, helping to prevent contamination and thermal gradients over the substrate. The gas delivery system can provide up to four different gas mixes with a unit of electro-valve connections and pressure controls that maintain a clean and stable environment. The chamber also has an advanced temperature control and cooling machine. It includes a built-in chiller and a furnace that provides a temperature controlled environment with a temperature range of 0 to 600C. The temperature of the chamber is monitored by a GASONICS ThermalVision Tool. To ensure a tight vacuum seal, NOVELLUS PEP 3510 comes standard with two robust gate valves. The first valve regulates the voltage input, while the second specifically maintains a tight vacuum environment. Additionally, PEP 3510 also has high-performance private gas sensors and detectors to provide additional safety against contamination and deposition. The chamber comes with an advanced three-way automated plasma power control asset & a superior plasma source. This ensures repeatable, defect-free processing with better control over etching. Furthermore, this tool has a programmable edge success incidence model with impedance robotics so users can easily adjust the edge profile of their etching. To ensure a clean processing environment, GASONICS / NOVELLUS PEP 3510 is fitted with a powerful NOVELLUS Pulse-O-Mizer equipment. This system is capable of producing bursts of very low-energy plasma for the removal of particles, creating a stable and particle-free operating environment. Overall, GASONICS PEP 3510 is an outstanding etcher/asher. It has an effective design with all the necessary features needed to execute precision etching and ashing processes, as well as additional safety features that ensure a safe working environment.