Used GASONICS / NOVELLUS PEP 3510 #9195884 for sale

GASONICS / NOVELLUS PEP 3510 is a high-speed plasma etch and ash tool that can be used in a variety of industry environments. This equipment offers high degree of process accuracy through utilization of industry-standard equipment and processes. GASONICS PEP 3510's advanced precision and performance is ideal for mission critical and delicate tasks such as MEMS and RF devices, where tight tolerances are a must. NOVELLUS PEP 3510 offers multifunctionality with both etch and ash capabilities, allowing users to switch between the two modes with no additional tooling changes. This enables manufacturers to quickly and easily transition between processes without the need for costly and time-consuming tool reconfigurations. PEP 3510 also has a built-in temperature controller that ensures uniform temperatures across the system for optimal process results. The ground breaking design of GASONICS / NOVELLUS PEP 3510 combines a patented gas delivery unit with a machined vacuum chamber, resulting in an optimum plasma etcher with increased accuracy and repeatability. Such advanced technology enables the tool to deliver an etching uniformity rating of +/-2um, ensuring consistent results regardless of the ambient environment. GASONICS PEP 3510 also includes an integrated chamber cleaning feature that eliminates time-consuming manual cleaning. NOVELLUS PEP 3510 offers an advanced array of process monitoring options that can be tailored to each individual application. The real-time display of process flow and short cycle time make an etch job more efficient and reliable. This machine also has advanced safety systems, with an emergency shutoff switch, chamber fire extinguishing tool, rapid pressure relief valves and emergency stop features. PEP 3510 is an incredibly effective etcher and asher, providing users with a dynamic array of features, including the ability to etch and ash at high speeds, and excellent process uniformity across board sizes and substrates. This asset is capable of etching intricate patterns and shapes onto a variety of materials, with repeatability and accuracy to meet even the most challenging industry requirements. The advanced safety systems and integrated chamber cleaning feature provide additional convenience and process control. GASONICS / NOVELLUS PEP 3510 is an ideal solution for a variety of businesses seeking high levels of performance and reliability for their etching and ashing needs.