Used GASONICS / NOVELLUS PEP 3510 #9195885 for sale

GASONICS / NOVELLUS PEP 3510 etcher / asher is a high-performance plasma etching and ashing equipment used in advanced microfabrication processes. It is designed to be a cost-effective, economically efficient solution for the etching and ashing of silicon-based thin film layers. GASONICS PEP 3510 combines a patented co-flow showerhead design, multilayer shielding, and other advanced etching technologies to provide an ultra-precise, high-precision etching process. The system is capable of achieving a very thin etch with minimal contamination. NOVELLUS PEP 3510 utilizes a patented co-flow showerhead nozzle that divides the etchant and couplant vapors into eight quadrants. This creates an etch process that is uniform and precise, without micro-etching distortion or voiding. PEP 3510 features a patented multilayer shielding unit that differentiates between etchant and couplant for improved process control. The machine provides a thermally isolated environment for the etch process, minimizing micro-etch distortion. GASONICS / NOVELLUS PEP 3510 is an extremely fast and economical tool. It is capable of achieving an etch rate of up to 30 microns per minute. It is able to process large numbers of substrates simultaneously and is capable of accommodating a wide range of suppliers. The asset uses a universal etching recipe and is compatible with multiple gases, resulting in reduced process complexity and time. GASONICS PEP 3510 offers a number of additional features to ensure the highest possible product quality. It utilizes a dual-frequency distributed power supply which prevents power fluctuation and provides a stable etch environment. NOVELLUS PEP 3510 also features programmable product lift-off and recipe optimization, enabling precise control of process parameters. Finally, it offers multiple safety features, including remote monitoring, an emergency shut-off switch, and a filtered exhaust model to ensure the health and safety of operators. Overall, PEP 3510 etcher / asher is an excellent choice for advanced microfabrication processes. It offers a precise, fast, and economically efficient way to etch and ashing thin film layers with minimal contamination. Its combination of advanced technologies, innovative features, and safety measures make it an ideal choice for etching and ashing of silicon-based thin film layers.