Used GASONICS / NOVELLUS PEP 3510 #9312374 for sale

GASONICS / NOVELLUS PEP 3510 is an etching and ashing equipment for use in semiconductor device manufacturing. It is a high-end system that combines two of the most popular process techniques — a plasma etch and a strip ash. It is capable of high throughput and enables process integration for high yields of both etch and ash processes. GASONICS PEP 3510 consists of a main control module, a vacuum unit, and the process chamber. NOVELLUS PEP 3510 includes a user interface which enables a custom recipe setup through its computer controlled machine. The vacuum tool controls the pressure of the process chamber and is vacuum-operated while the main control module provides full control of all process functions. PEP 3510 uses a plasma etch process that has a higher selectivity and etch rate than traditional etching techniques. The plasma etch process reduces the size of loading on the etching mask, enabling higher yields and reducing the chance of contamination. The etch process can be performed in either a single direction or dual-direction with the ability to independently control the etch direction. GASONICS / NOVELLUS PEP 3510 also offers a strip ash process that uses an ash chamber to strip off an oxide layer from the wafer. It is a dry stripping process which is more efficient than wet stripping processes. The ash chamber can be operated in either a single-step or a multi-step mode for highly-integrated process steps. In addition, GASONICS PEP 3510 includes a variety of advanced process technologies to enhance the etch and ash processes. These include advanced wafer handling systems, automated wafer and sample loading systems, cryogenic delivery for high-throughput rates, and dedicated tool software for advanced recipe development. Overall, NOVELLUS PEP 3510 is a reliable etching and ashing asset that offers high yields through efficient process integration. The combination of advanced process technologies and robustness make it a great choice for semiconductor device manufacturing.