Used GASONICS / NOVELLUS PEP 3510A #9146555 for sale
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ID: 9146555
Wafer Size: 8"
Vintage: 1995
Asher, 8"
Cassette Interface:
(2) ASYST Integrated SMIF
Wafer handler: Dual blade
Model: XU-RCM4700 rev 2
Left module:
Model: PEP 3510A (L)
Configuration: 95-0481
Power: 208 V, 60 Hz, 30 A, 1 Phase / WYE
Source / Process kit type: Quartz
Platen type: Standard
Power supplies:
MWave PS: AGL C13170 (1250W)
Left module gas configuration:
Gas Flow (sccm) MFC Mfgr MFC Model
O2 4000 TYLAN FC-2900MEP
N2 200 TYLAN FC-2900MEP
N2H2 4000 TYLAN FC-2900MEP
Right module:
Model: PEP 3510A (R)
Configuration: 95-0482
Power: 208 V, 60 Hz, 30 A, 1 Phase / WYE
Source / Process kit type: Quartz
Platen type: Standard
Power supplies: MWave PS: AGL C13170 (1250W)
Right module gas configuration:
Gas Flow (sccm) MFC Mfgr MFC Model
O2 4000 TYLAN FC-2900MEP
N2 200 TYLAN FC-2900MEP
N2H2 4000 TYLAN FC-2900MEP
Power: 208 V, 50 Hz, 150 A, 1 Phase / WYE
1995 vintage.
GASONICS / NOVELLUS PEP 3510A is an advanced etch/ash tool capable of high-precision etching and surface modification. It is an integrated multiple-stage process tool that supports both etching and surface modification on a single platform. This is achieved by using a single gas line and a fine-spaced electrode array, as well as a variety of power levels and chemistry combinations. The tool is especially designed to meet the requirements of challenging 3D memory and stacked device applications. GASONICS PEP 3510A provides an unmatched speed of up to 100 wafers/hour, which translates to a process time of less than 10 seconds per wafer. In addition, the platform allows for a wide process range from shallow etch depths to greater than 6 microns and with very tight control over process repeatability and precision. As a result, the etch/ash tool is excellent for devices featuring multi-layer depth structures, bottom sidewall patterning and FinFETs. The tool is designed with a number of advanced features and options including a four-balance electrode array, a built-in capacitance manometer, and spectroscopy-grade digital mass flow controllers. This allows for tight process control, as well as accurate chemistry delivery and temperature control. NOVELLUS PEP 3510A is capable of handling a wide range of chemistries, including chlorine, bromine, fluorinated, oxidants, and more, enabling users to customize the process according to their specific application. Additionally, PEP 3510A includes distributed power-supply support with several inputs and outputs. This helps to further ensure process repeatability and accuracy. In conclusion, GASONICS / NOVELLUS PEP 3510A is an advanced, high-speed etch/ash tool incorporating a number of features and options that ensure tight process control, accurate chemistry delivery, and excellent repeatability. As a result, GASONICS PEP 3510A is ideal for users looking for a reliable, high-precision etching and surface modification solution for challenging 3D memory and stacked device applications.
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