Used GASONICS / NOVELLUS PEP 3510A #9146556 for sale
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ID: 9146556
Wafer Size: 8"
Vintage: 1997
Asher, 8"
Machine hours: 29389
Cassette interface:
(2) ASYST Integrated SMIF
Wafer handler: Dual blade
Model: XU-RCM4700 rev 3
Left module:
Model: PEP 3510A (L)
Configuration: 95-0481
Power: 208 V, 60 Hz, 30 A, 1 Phase / WYE
Source / Process kit type: Quartz
Platen type: Standard
Power supplies: MWave PS: Astex OEM C13170 (1250W)
Hours: 34260.9
Left module gas configuration:
Gas Flow (sccm) MFC Mfgr MFC Model
O2 4000 BROOKS 5964
N2 200 BROOKS 5964
N2H2 4000 BROOKS 5964
Right module:
Model: PEP 3510A (R)
Configuration: 95-0482
Power: 208 V, 60 Hz, 30 A, 1 Phase / WYE
Source / Process kit type: Quartz
Platen type: Standard
Power supplies: MWave PS: Astex OEM C13170 (1250W)
Hours: 16547.1
Right module gas configuration:
Gas Flow (sccm) MFC Mfgr MFC Model
O2 4000 BROOKS 5964
N2 200 BROOKS 5964
N2H2 4000 BROOKS 5964
Power: 208 V, 60 Hz, 150 A, 1 Phase / WYE
1997 vintage.
GASONICS / NOVELLUS PEP 3510A is a high-precision etcher/asher designed for use in a variety of applications. This machine is able to accurately etch or asher various materials with a high degree of precision and repeatability for us in microelectronic and optoelectronic manufacturing. GASONICS PEP 3510A features an advanced software-based, motor-driven control system, which allows for programming of various etching or ashing parameters such as chamber pressure, reaction time, and temperature. This allows for quick and accurate etching or ashing of the targeted material. NOVELLUS PEP 3510A also features two distinct chambers that are maintained in a vacuum environment. Each chamber has its own individually-controlled RF power supply and can be configured for either etching or ashing as required. PEP 3510A also offers several safety features, including an interlock system, a shutoff valve, and a pressure gauge. These safety features are designed to ensure that the material etched or ashed is of the highest quality and that the machine's environment is always maintained safely and accurately. GASONICS / NOVELLUS PEP 3510A is a highly versatile machine, capable of etching or ashing a variety of materials, including aluminum, silicon, gallium arsenide, indium phosphide, and other high-performance materials. This makes it an ideal machine for use in high-precision manufacturing applications. In addition to its etching and ashing features, GASONICS PEP 3510A also features a built-in plasma source that can be used for post-etch or ashing cleaning. The plasma source is adjustable for both dry plasma cleaning and wet plasma cleaning. This helps provide a clean and damage-free finish after etching or ashing. Finally, NOVELLUS PEP 3510A is an extremely efficient machine. Its unique design and advanced software-controlled motor drive provide for high performance and quick cycle times. Additionally, the machine's controls are straightforward and easy to use, which ensures that users can quickly and accurately set up, program, and execute their etching and ashing processes.
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