Used GASONICS / NOVELLUS PEP 3510A #9146556 for sale

GASONICS / NOVELLUS PEP 3510A
ID: 9146556
Wafer Size: 8"
Vintage: 1997
Asher, 8" Machine hours: 29389 Cassette interface: (2) ASYST Integrated SMIF Wafer handler: Dual blade Model: XU-RCM4700 rev 3 Left module: Model: PEP 3510A (L) Configuration: 95-0481 Power: 208 V, 60 Hz, 30 A, 1 Phase / WYE Source / Process kit type: Quartz Platen type: Standard Power supplies: MWave PS: Astex OEM C13170 (1250W) Hours: 34260.9 Left module gas configuration: Gas Flow (sccm) MFC Mfgr MFC Model O2 4000 BROOKS 5964 N2 200 BROOKS 5964 N2H2 4000 BROOKS 5964 Right module: Model: PEP 3510A (R) Configuration: 95-0482 Power: 208 V, 60 Hz, 30 A, 1 Phase / WYE Source / Process kit type: Quartz Platen type: Standard Power supplies: MWave PS: Astex OEM C13170 (1250W) Hours: 16547.1 Right module gas configuration: Gas Flow (sccm) MFC Mfgr MFC Model O2 4000 BROOKS 5964 N2 200 BROOKS 5964 N2H2 4000 BROOKS 5964 Power: 208 V, 60 Hz, 150 A, 1 Phase / WYE 1997 vintage.
GASONICS / NOVELLUS PEP 3510A is a high-precision etcher/asher designed for use in a variety of applications. This machine is able to accurately etch or asher various materials with a high degree of precision and repeatability for us in microelectronic and optoelectronic manufacturing. GASONICS PEP 3510A features an advanced software-based, motor-driven control system, which allows for programming of various etching or ashing parameters such as chamber pressure, reaction time, and temperature. This allows for quick and accurate etching or ashing of the targeted material. NOVELLUS PEP 3510A also features two distinct chambers that are maintained in a vacuum environment. Each chamber has its own individually-controlled RF power supply and can be configured for either etching or ashing as required. PEP 3510A also offers several safety features, including an interlock system, a shutoff valve, and a pressure gauge. These safety features are designed to ensure that the material etched or ashed is of the highest quality and that the machine's environment is always maintained safely and accurately. GASONICS / NOVELLUS PEP 3510A is a highly versatile machine, capable of etching or ashing a variety of materials, including aluminum, silicon, gallium arsenide, indium phosphide, and other high-performance materials. This makes it an ideal machine for use in high-precision manufacturing applications. In addition to its etching and ashing features, GASONICS PEP 3510A also features a built-in plasma source that can be used for post-etch or ashing cleaning. The plasma source is adjustable for both dry plasma cleaning and wet plasma cleaning. This helps provide a clean and damage-free finish after etching or ashing. Finally, NOVELLUS PEP 3510A is an extremely efficient machine. Its unique design and advanced software-controlled motor drive provide for high performance and quick cycle times. Additionally, the machine's controls are straightforward and easy to use, which ensures that users can quickly and accurately set up, program, and execute their etching and ashing processes.
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