Used GASONICS / NOVELLUS PEP 3510A #9170813 for sale

GASONICS / NOVELLUS PEP 3510A is an etching and ashing equipment design for high-volume chip-making applications in the semiconductor industry. It is used for the pattern transfer and device fabrication of the latest IC (Integrated Circuit) designs. The system has a 6-channel parallel-processing architecture that allows for efficient etch/ash processes on a wide variety of materials, making it ideal for high-volume production. The unit is also equipped with tight process integration and can easily integrate with other GASONICS equipment. The machine consists of a robotic loading dock and unloading dock, a mainframe processor, a vacuum chamber, and a number of pistons and vacuum pumps. The robotic dock uses an articulated arm to move wafers from the cassette queuing station to the etch chamber. The mainframe processor allows for accurate control of the etch parameters. The vacuum chamber holds the wafer during the etching and ashing processes, and the pistons and vacuum pumps are used to move, control and maintain the pressure in the chamber. The tool is capable of etching and ashing a variety of materials, including silicon wafers, aluminum, copper, tungsten, and others. It has the capability to process up to 4500 wafers per hour in one single chamber. The asset also has a variety of etching and ashing parameters which it can be programmed to adhere to, providing increased accuracy and repeatability. The model is armed with innovative safety and contaminant control features. Wafer cassettes are isolated from the equipment during the transfer process, reducing the chance of contamination or damage. The system also includes a wafer humidity sensor, an electrostatic chuck to ensure proper wafer loading and unloading, and high-efficiency filters to minimize particulate and vapor contamination. GASONICS PEP 3510A is a powerful and reliable etching and ashing unit that is designed for the high-volume wafer processing needs of the semiconductor industry. With its high-performance features, tight process integration, and innovative safety features, it is a great choice for chip-making operations that require accurate and repeatable pattern transfers.