Used GASONICS / NOVELLUS PEP 4800 #9352587 for sale
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GASONICS / NOVELLUS PEP 4800 is an advanced and highly efficient etcher/asher equipment that offers unparalleled performance for precision applications. The system is built around the concept of parallel processing, allowing for faster and more efficient operations than many other systems currently available. GASONICS PEP 4800 comes with two high-precision, low-profiling chambers that use parallel metallization transfer (MFT) technology to deposit metal films onto the substrate. This enables precise etching and ashing while maintaining cleanliness of the substrate throughout the process. The unit is equipped with two independently controlled and separately located plasmas. The process parameters can be easily configured via the integrated PEP control machine, which provides full tool monitoring and control. To guarantee superior quality deposition, NOVELLUS PEP 4800 utilizes advanced diagnostics, quality checks, and feedback protocols. The integrated process control enables users to monitor in real-time the etching and ashing process. Furthermore, PEP 4800 is designed with an efficient substrate control asset as it features a vacuum, high-power DC power supply, end-point detection model, and a replaceable substrate support equipment. GASONICS / NOVELLUS PEP 4800 also comes equipped with a range of advanced features, including active substrate cooling and an automated multi-source gas mixing system. The gas mixing unit is designed to ensure a consistent mixture of highly volatile gas molecules and allows for a highly accurate coating deposition process. Additionally, GASONICS PEP 4800 is designed with advanced safety features to ensure a safe operation. This includes a gas-tight chamber, dual emergency-stop switches, gas shut-off timing, and an exhaust machine with integrated filtration. Overall, NOVELLUS PEP 4800 is an ideal solution for precise etching and ashing applications. The tool offers high-performance efficiency combined with accurate and high-quality results. It also ensures a safe and reliable operational experience due to the advanced safety measures in place. PEP 4800 is part of a comprehensive solution for etching and ashing complex device architectures and therefore is an invaluable tool for the modern semiconductor industry.
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