Used GASONICS / NOVELLUS PEP 4800DL Iridia #293595640 for sale

GASONICS/GASONICS / NOVELLUS PEP 4800DL Iridia is an industrial etcher/asher designed for ultra-high precision critical layer etching and high speed processing. It is capable of performing a wide range of high-end processing requirements such as shallow trench etching, trench-to-trench plating, dry etching, and backside contact etching. Using an advanced lithography equipment and gas delivery system, the machine is capable of producing challenging structures at the sub-micron level with a high degree of accuracy and repeatability. The machine is equipped with a unique double stage plate rotation unit which ensures a high consistency and allows for optimal placement of both etched and ashed layers. The PEP 4800DL is capable of processing substrates up to 8 in. (200 mm) diameter and up to 0.4 in. (10 mm) thick. It uses both wet and dry etching processes, allowing for the production of highly complex devices. As a standard feature, the machine is equipped with a powerful and stable DC/AC plasma source, providing a steady plume at all times. For maximum flexibility, the machine can be equipped with up to 24 independentprocess chambers and is capable of handling a large variety of chemical precursors and gases. The advanced integrated gas delivery machine provides a highly reliable and consistent gas flow, ensuring a perfect process match for any etching or ashing requirement. The PEP 4800DL is fully automated and features a built-in monitor and data acquisition tool, eliminating operator intervention and providing accurate, reproducible results. It is configured with a sophisticated computer-controlled process cycle, allowing the engineer to modify process parameters and optimize process. Additionally, it can be equipped with an optional after-treatment mechanism which can be used to ensure complete flawlessness during processing. The machine also integrates with NOVELLUS/GASONICS / NOVELLUS aftermarket process monitoring and analysis software, allowing for complete process control and tracking during processing.