Used GASONICS / NOVELLUS PEP 4800DL Iridia #9308743 for sale

GASONICS / NOVELLUS PEP 4800DL Iridia is a versatile etcher/asher equipment. It is used for advanced processing of metal alloys, semiconductor materials, organic films and advanced dielectrics in the etch, deposition or annealing of solids. The Iridia is ideal for those seeking an automated, high-precision, and cost-effective system. GASONICS PEP 4800DL Iridia supports parallel processing, allowing it to automatically tune and optimize recipes for different substrates on the same substrate plate. It also has the ability to control multiple substrate plates and parameter selections while simultaneously running multiple substrates with different settings. The Iridia utilizes X-Ray Reflectometry to measure thick films in real time. This allows for high-accuracy pre-stage and post-stage thin film thickness measurements, aiding in characterization of complex films. The unit also utilizes modern robotics, precision pre-alignment, and in-situ wafer monitoring/control. The Iridia is capable of faster through-put times due to its multi-tasking capabilities. It also features an advanced cooling machine to ensure optimal thermal transfer and high-yielding processes. In addition, the Iridia features an asher, which can perform high-rate deposition of dielectric, spin-on dielectric, or protective layers. The Iridia is also designed with safety in mind, featuring an intuitive user-friendly interface and remote operation via an EtherCAT-based communications network. The Iridia's modular design allows for future upgrades and changes to the tool, as well as for integration into other manufacturing systems. NOVELLUS PEP 4800DL Iridia is a robust, easy-to-use etcher/asher asset designed to reduce costs and optimize process performance in advanced wafer-level etching and deposition applications.