Used GASONICS / NOVELLUS PEP 4800DL Iridia #9382963 for sale

GASONICS / NOVELLUS PEP 4800DL Iridia
ID: 9382963
Vintage: 1998
Stripper / Asher 1998 vintage.
GASONICS / NOVELLUS PEP 4800DL Iridia is a Plasma-Enhanced Chemical Vapor Deposition (PECVD) equipment providing advanced etching and ashing technologies with high level process optimization for microelectronic device applications. This etcher/asher facilitates efficient device formation, integration, and enhancement with precise control over uniformity, repeatability, and uniformity of deposition, eliminating variability in device layers and enabling precise thin-film deposition. The system's integrated wafer heater, automation, and improved dispersion technologies enable reliable and effective process control for repeatable results. GASONICS PEP 4800DL Iridia utilizes a high-performance gas blanket unit to support a wide variety of etch chemistries, providing industry-leading etch rate and uniformity. This machine incorporates advanced software technologies, allowing for process optimization and fine tuning in a customizable fashion, enabling high-quality process results for a wide variety of device types. The etcher/asher's patented dynamic process integration (DPI) technology utilizes advanced algorithms to optimize etching and ashing jobs on a wafer-by-wafer basis. The DPI technology intelligently interprets wafer-level data to allow users to customize job recipes to maximize throughput, yield, and quality. NOVELLUS PEP 4800DL Iridia's advanced Soft-etch™ technology enables broadband, low-voltage etching, facilitating controlled variation of etch depth without variances in etch rate. This allows for more finely etched structures and nanoscale features to be fabricated, enabling for better and more intricate device designs. The tool is powered by a high-performance, fully-automated control asset featuring Adaptive Processing Control™ technology, providing users the ability to adjust etch and ashing parameters with ease, for perfect wafer quality and uniformity. The model also offers Remote Assistance™ software, providing expert remote on-demand service to maximize productivity and minimize downtime. To enhance process efficiency further, PEP 4800DL Iridia features quick DC healing and preclean technologies, eliminating the need for evaporation of HCl prior to etching. This equipment is also equipped with a self-cleaning process, allowing for quick wafer purification in between etch runs. Overall, GASONICS / NOVELLUS PEP 4800DL Iridia is a powerful and advanced etcher/asher system, designed for high-quality etch, ashing, and deposition of microelectronic devices. With sophisticated process optimization and customization capabilities, exceptional control and uniformity, and efficient dispersion and cleaning technologies, GASONICS PEP 4800DL Iridia is an excellent choice for any fabrication facility.
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