Used GASONICS / NOVELLUS PEP 4800DL #9404470 for sale

GASONICS / NOVELLUS PEP 4800DL is a state of the art plasma etcher/asher designed for use in semiconductor, materials science and submicron device manufacturing environments. This equipment is capable of performing a wide range of etching and ashing processes and has been designed for use in high volume production runs. The system utilizes a dual laser plasma etch process, meaning two lasers of different wavelengths are used to vaporize material simultaneously, resulting in excellent etch accuracy and uniformity across the substrate. GASONICS PEP 4800DL is equipped with a 5x5mm beam spot and is capable of etching feature sizes down to 5nm. The unit has a capacity of up to 600 wafers per batch and is also programmed with a recipe and editing features that allow users to customize etching recipes to match their specific device requirements. The machine is equipped with both a chemical and gas source, allowing it to process a wide range of materials. The chemical source consists of the chemical supply, which is connected to the tool by a flexible hose. The gas source consists of a radio frequency powered device that is used to supply etching and ashing gases to the asset. The model also has a high vacuum chamber, as well as several in-situ and ex-situ monitoring sensors that allow users to monitor the etching process throughout the entirety of the etching cycle. This ensures a high level of process control and ensures uniform etch performance. The equipment is also equipped with a comprehensive safety suite to ensure operator safety. Overall, NOVELLUS PEP 4800DL is a highly reliable and accurate plasma etcher/asher designed for high volume production use. The system offers excellent etch accuracy and uniformity, is capable of etching features down to 5nm, and is equipped with a suite of features that allow users to customize their etching recipes to match their specific device requirements.