Used GASONICS / NOVELLUS PEP Iridia #122244 for sale

ID: 122244
Wafer Size: 8"
Vintage: 2005
Asher, 8" (2) Chambers 2005 vintage.
GASONICS / NOVELLUS PEP Iridia, an etcher/asher, is a specialized electro-chemical, nanopriniting system for high precision dielectric and conductive patterning. It is a fully integrated solution for the development of complex, high performance semiconductor device structures and is suitable for a variety of applications. GASONICS PEP Iridia is the perfect choice for integrated product development and manufacturing. It features advanced process monitoring and intricate precision control, with the ability to achieve high aspect ratio structures of up to 40:1, without any damage to the wafer. NOVELLUS PEP IRIDIA also has the capability to produce structures with feature sizes as small as 16nm, with excellent uniformity and feature-edge quality throughout entire wafers. Other features of GASONICS PEP IRIDIA include: High throughput to increase productivity with advanced system automation Ability to efficiently deposit and etch a wide range of materials, including dielectrics and conductive materials, including Silicon Carbide, Silicon Nitride and Silicon Oxide High aspect ratio patterning Capability to produce 3D etched structures with pattern depths up to 500 nm Advanced monitoring and analytical capabilities for fully automated process data gathering for better process control Overall, NOVELLUS PEP Iridia is an extremely accurate and reliable etcher/asher for ultra-precise semiconductor device production. Its features will ensure excellent precision and consistency in the production of highly complex, high performance device structures. This tool is the best choice for device fabrication and will be invaluable for any manufacturer desiring reliable, accurate, and highly functional semiconductor products.
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