Used GASONICS / NOVELLUS PEP Iridia #122247 for sale

GASONICS / NOVELLUS PEP Iridia is a specialized etch/ash equipment designed by GASONICS and NOVELLUS to improve the complexity and speed of etching and ashing processes. Utilizing advanced laser ablation technology, GASONICS PEP Iridia offers an efficient and versatile solution for chemical masking and etching of semiconductor wafers used in the microelectronic industry. NOVELLUS PEP IRIDIA features a multi-axis scan head that enables high-precision laser ablation across the full surface area of a wafer. This scan head contains a configurable array of laser emitters that can create a complex network of shape/intensity combinations when targeting chemical masks. Its computer-controlled scan speed can reach up to 300 mm/s, operating with a pulse width between 1- 300 ms. This flexible scanning and high-speed operation help speed up the otherwise slow chemical mask and etch processes. Additionally, PEP Iridia uses laser sources with an adjustable power from 0-200 mJ/cm^2 pulse, allowing the operator to fine-tune the etch and ash processes as needed. This offers the flexibility to adjust and customize so that results can be perfectly tailored to the needs of the applications at hand. Furthermore, the system is designed with user safety in mind, featuring double safety interlocks and a novel bio-elastic safety layer that helps absorb and dissipate shock. The entire etch/ash unit is highly automated and configurable, making it easy to set-up and operate. GASONICS PEP IRIDIA works in combination with GASONICS / NOVELLUS and GASONICS software, allowing complicated design drawings to be quickly input and then accurately translated into the etch/ash recipe. The machine ultimately enables efficient, repeatable and reliable chemical masking and etching processes with excellent precision.