Used GASONICS / NOVELLUS PEP Iridia #9102816 for sale
It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.
Tap to zoom
Sold
ID: 9102816
Vintage: 2005
Poly etcher, parts machine
(2) Chambers
Cluster PC
(2) PCM PC
YASKAWA Robot
YASKAWA Robot controller
Main body
Missing parts
Cluster mini controller
Left PMSC mini controller
Left PGAS mini controller
Left PMWV mini controller
Left PEOP mini controller
Left lamp mini controller
Left temp controller
Left M/W generator
Left RF generator
Left RF matcher
Left RF matcher box
Left PUMP
Left chiller
Right PMSC mini controller
Right PGAS mini controller
Right PMWV mini controller
Right PEOP mini controller
Right lamp mini controller
Right temperature controller
Right M/W generator
Right RF generator
Right RF matcher
Right RF matcher box
Right pump
Right chiller
MFC Gas 1
BROOKS
6265C
CF4 100 SCCM
MFC Gas 2
BROOKS
6265C
N2 500 SCCM
MFC Gas 4
BROOKS
6265C (Right: S9Z84402)
H2 2SLPM
MFC Gas 5
BROOKS
6265C
NF3 20 SCCM
MFC Gas 8
BROOKS
6265C
O2 50 SCCM
Includes:
(2) Chillers
No pump
2005 vintage.
GASONICS / NOVELLUS PEP Iridia is an advanced etching/asher equipment designed for sub 300mm wafer processing. It can be used in a wide range of processes such as photoresist and stripping, barrier layers, shallow trench isolation, and III-V compound layers. GASONICS PEP Iridia is built on advanced etch technology and features Synchronous Gas Delivery (SGD) with dual wafer load lock interface. This allows for precision control of the chemistries used, allowing for the highly accurate application of desired etch species. NOVELLUS PEP IRIDIA is capable of precisely controlling the ratio of active species in the etchant, allowing for high product uniformity and improved process specs. Also featured is Variable Frequency Gas Exchange (VFGE), which allows for interchangeable processes on all system configurations. PEP IRIDIA is a fully integrated etching unit which can process multiple wafer sizes. It is designed for continuous wafer loading and unloading, with software that allows for individual wafer processes. The machine can be integrated with a range of advanced sensors which are connected to the tool, enabling the process to be monitored in real-time. This increases the accuracy and stability of the etching process. NOVELLUS PEP Iridia also features improved temperature control and precision with a fully automated thermal profiling asset. This is matched with a highly flexible gas control model which allows for the latest PECVD and ICP processes. Overall, PEP Iridia is an advanced etching/asher equipment designed for sub 300mm wafer processing. It features a range of advanced technology to enable precision, stability, and accuracy during the etching process and a range of software which enables flexibility and customisation.
There are no reviews yet