Used GASONICS / NOVELLUS PS 10 #9192618 for sale

ID: 9192618
Asher Dry strip.
GASONICS / NOVELLUS PS 10 is an etcher/asher equipment designed for advanced deposition or etching processes in the semiconductor fabrication process. The system is composed of two main units; the Spiral 400W power supply and the LAM 9600 plasma etcher/asher. It is a cost effective solution that enables the creation of high quality and high precision circuit features such as thin films, lines, layers, and vias. The Spiral 400W power supply consists of intelligent, self-adjusting output modules and controllable output stages that provide uniform current and voltage during etching and ashing processes. It is designed to be flexible and has the ability to be customized depending on the conditions and requirements of a specific process. This model also offers advanced control capabilities, which are enabled through its user-friendly software interface. The LAM 9600 plasma etcher/asher, on the other hand, is integrated with a high density plasma chamber developed especially for advanced etch and ashing processes. It is equipped with a four-inch wafer loading unit, which can handle up to 20 wafers in batch mode and is designed to meet the highest industry requirements for cleanliness and process safety. It also offers a range of process capabilities, such as high-throughput etching and ashing, while maintaining a high level of precision. Moreover, GASONICS PS 10 machine offers a range of safety features such as interlock systems and safety processes, allowing it to handle dangerous high temperatures safely. The tool utilizes a nitrogen shower and turbomolecular pumps that help to ensure a clean, safe, and reliable environment for the asset's operations. On top of that, the model employs an advanced diagnostics equipment which allows it to detect and diagnose any abnormalities in the system that could affect its operations and performance. Overall, NOVELLUS PS 10 unit is an effective and reliable solution for performing advanced deposition and etching processes in the semiconductor fabrication process. It is cost effective, offers flexible control features, and comes with a host of safety features that help to ensure a safe and reliable work environment. It can be relied upon to deliver consistent and precise results in the most challenging of etching and ashing processes.
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