Used GASONICS / NOVELLUS Sierra #9312059 for sale

GASONICS / NOVELLUS Sierra is a state-of-the-art etcher and asher with advanced and versatile capabilities. The device features a vacuum chamber, vacuum nozzle, and Uniform Processing Platforms, allowing for precise and controlled etching and ashing of small substrates. The low temperature deposition (LTD) process allows for very thin deposition. GASONICS Sierra is a critical tool for integrated circuit (IC) fabrication, allowing for the removal of layers of material or for the deposition of one or more thin layers of material. It is capable of both plasma asher and dry etching, with each process used for different applications. The etchant can be chosen to best accommodate the specific wafer substrate and layer material being processed. NOVELLUS Sierra features a high rate of throughput and is effective in etching all types of materials including aluminum, polysilicon, silicon oxynitride, and refractory metals. It has a wide temperature range, allowing for a variety of etching processes. It is highly reliable and efficient, allowing for a maximum number of line edge roughness (LER) and critical dimension (CD) requirements. This makes it ideal for use in high-quality IC fabrication. Sierra also features a large chamber capacity, allowing for the handling of large numbers of substrates. It is capable of removing bulk material quickly and efficiently while also providing a high degree of precision. With the ability to transfer substrates efficiently, GASONICS / NOVELLUS Sierra provides a great amount of flexibility, allowing for efficient and effective material deposition and removal. GASONICS Sierra is designed for IC manufacturing, with processes requiring thin layers and high resolution. It offers excellent reliability, performance, and flexibility, making it an ideal etcher and asher for IC applications.