Used GASONICS / NOVELLUS Spare parts for PEP Iridia #9329056 for sale
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ID: 9329056
Qty / Part number / Description
(1) / 95-3532 / IRIDIA Chamber door
(1) / 60-2025 / Magnetron 1.9 kW water cooled
(1) / 95-4321 / CLTC ASSY
(1) / 22-2715 / Valve diaphragm VCR NC AP
(2) / 95-3646 / CLTC ASSY
(1) / 23-2644 / Xducer pressure 11T NW8 VCR F+13TO+32 (VDC/0-10VDC,5%5 PIN)
(4) / 01-4491 / Cap top CLTC (Rev A)
(1) / 94-3043 / Light probe 2 mm QUARTZ With aluminum sheath
(1) / 95-0350 / Down stream EOP Electronics assy
(1) / 06-2725 / Shower head tube 1.83ID Sapp
(1) / 06-2654 / Orifice bottom SAPPHIRE ASTEX
(1) / 06-2767 / Orifice bottom 375I D SAPPHIRE ASTEX
(2) / SS-BN8FR8-C / 316L Stainless steel high purity bellows sealed valves, 1/2",Female SWAGELOK VCR Metal gasket face seal fitting, NC Actuator
(4) / 05-3173 / Cover housing lamp trays 4 DDP/0L
(1) / 97-3076 / Kit press RFL PRCS Chamber sob system
(1) / 94-3044 / Cable assy fiber optic
(1) / 04-2400 / Cartridge heater 1/4 OD, 32"
(1) / 04-2398 / Cartridge heater 1/4 OD, 26"
(2) / 94-3241 / Hard disks
(1) / 94-3245 / Hard disk
(1) / 15999-01 / EOP Box modification
(1) / 06-2614 / Pin alignment 3/16 DIA x 0.35 L Alumina
(3) / 21-170779-00 / Screws for robot M 2x15
(3) / 21-170714-00 / Screws for robot M 2x8
(1) / 40-2014 / Fuse for robot
(1) / EC4-R 1/8C1 / Clean joint connector 4 mm for 1/8 robot
(1) / EC4-R 1/4C1 / Clean joint connector 4 mm for 1/4 robot
(1) / 465-5547(465-5503) / Inlet filter switch
(10) / SS-8-VCR-2-VS / 316L Stainless steel VCR Face seal fittings, 1/2", Unplated gasket, non retained style
(2) / 465-362 / D Sub connectors 9 pin socket
(2) / 465-390 / D Sub connectors 25 pin
(5) / 465-356 / D Sub connectors 9 pin plug
(3) / PS0SOSS60 / AC Inlet filters
(4) / 555-409 / Temperature sensor seal level strips
(4) / 555-415 / Temperature sensor seal level strips
(1) / J01-9250 / Knurling for IR Probe
(2) / J01-9240 / Sleeves for IR Probe
(1) / SFH203 / Photo diode IRIDIA MW Plasma detection
(5) / 322-8813 / Time lag fuses (MW Power supply back side)
(5) / 318-1900R / Ceramic capacitors
(2) / 05-3362 / Weldment, bellows lift pins
(1) / 05-3636 / Platen braze W/CLTC, 8" IRIDIA-DL
(1) / 05-3636 / Platen braze W/CLTC, 8" IRIDIA-DL
(6) / 02-3994 / REF Lector lamp trays IRIDIA-DI
(2) / MK2P-I / Power relay AC Power boxes (2 point of contact)
(4) / MK3P-I / Power relay AC Power boxes (3 point of contact) (AC 220 V)
(4) / GT3A-2AD24 / Analog timer AC Power boxes
(4) / 70953-02 / Relays, S/S PWR-5VDC-25A 240 VAC
(10) / HCPL-2731 / Photo couplers
(10) / HCPL-2531 / Photo couplers
(4) / A040-4E2-DC24V / Solenoid valves (KOGANEI)
(1) / 02-297394-00 / ASSY, CLTC, IRIDIA
(1) / 94-2670 / Pressure controller for SIG
(3) / 95-3420 / Ring PIN ASSY QUARTZ
(2) / 01-4328 / Platen al pedestals (Rev B)
(1) / 94-3077 / Sapphire tube
(1) / 06-2509 / Spacer top QUARTZ
(1) / 06-2516 / Plate top QUARTZ
(1) / 06-2521 / Plate QUARTZ 4.08OD×1.25ID
(1) / 06-2599 / Plate QUARTZ 4.08OD×1.75ID
(4) / 06-2619 / Plate QUARTZ tri adaptors
(1) / 530-CE-0300027(06-2568) / Centering ring ceramic
(3) / 06-2802 / Lift pin sapphires
(4) / A78-096-01 (9120-SC520) / O-Rings CHEMRAZ AS-120 9120-SC520 White
(23) / 78-0124 / O-Rings kalrez 5-116 0.741ID×0.104 W
(4) / 78-0146 (9314-SS520) / O-Rings CHEMRAZ AS-314 9314-SS520 White
(7) / 78-2683 (9309-SS520) / O-Rings CHEMRAZ AS-309 9309-SS520 White
(13) / 78-2685 (9123-SS610) / O-Rings CHEMRAZ AS-123 9123-SS610 White (PEP IRIDIA)
(10) / 78-2721 (NOK F201) / O-Rings viton AS-108 Black
(5) / A78-055-01 (9123-SD550) / O-Rings CHEMRAZ AS-123 9123-SD550
(4) / 06-2598 / Lift pins QUARTZ (Standard 86.7 mm)
(8) / 06-2620 / Pin plugs QUARTZ
(20) / JPD120V1000W/FEL/G9.5S / Lamp / Halogen lamp 120 V, 1000 WUK
(3) / 78-0128 (9024-SS520) / O-Rings CHEMRAZ AS-024 9024-SS520 White
(8) / 78-2606 / O-Rings CHEMRAZ AS-151 9151-SC520 WHITE
(6) / 78-2709 (9151-SC520) / O-Rings CHEMRAZ AS-151 9151-SC520 White
(6) / 78-2712 (9144-SC520) / O-Rings CHEMRAZ AS-144 9144-SC520 White
(2) / 78-2732 (9012-SC513) / O-Rings CHEMRAZ AS-012 9012-SC513 White
(3) / 78-2733 (9112-SC513) / O-Rings CHEMRAZ AS-112 9112-SC513 White
(10) / 40-0059 / Fuses 5 Amp slow blow
(6) / 71325-18 / Fuses 3 AG
(10) / 4201B16303-SC513 / O-Rings CHEMRAZ
(8) / 78-2713 (9275-SC520) / O-Rings CHEMRAZ AS-275 9275-SC520
(2) / 78-2710 (9274-SC520) / O-Rings CHEMRAZ AS-274 9274-SC520
(1) / 78-2753 / O-Ring, 9-331, 2.225 ID x .210 W CHEMRAZ
(6) / A39-005-01 / Lamps / Halogen lamp (21 V, 150 W)
(11) / 78-2734 (9006-SC520) / O-Rings CHEMRAZ AS-006 9006-SC520
(4) / 78-0134 / O-Ring applicators (9326-SC520)
(2) / 71329-31 / F3 Fuses
(8) / 4201B16201-SS513 / O-Rings CHEMRAZ
(10) / BK-GDC-630MA / Fuses 630 MA 250 V T-LAG GLAS GDC
(8) / 78-2808 (P/N: POROROCA381M) / O-Ring window lamp trays IRIDIA-DL
(1) / 06-2697 / Window SAPPHIRE lamp tray IR
(2) / A78-107-01 / Ring centerings NW40 CHEMRAZ 550 9-326
(3) / 78-2738 (9363-SC520) / O-Rings CHEMRAZ AS-363 9363-SC520
(1) / 06-2768 / Tube 1.615 L SAPPHIRE ASTEX
(6) / AS568-163 / O-Rings perfluor AS-163 (Door o-ring) (barrel)
(4) / 78-2784 / O-Ring silicones
(6) / 78-2783 / O-Ring silicones
(4) / 9214-SS520 / O-Rings CHEMRAZ AS-214 (Applicator)
(7) / 78-2786 / O-Rings silicone
(4) / 78-2787 / O-Rings CHEMRAZ 520PFA
(10) / 78-2788 / O-Rings viton PFA
(2) / PCS-2100-0C / Rinse tank drain bar for parts cleaning equipments
(2) / 01-5813 / Folder lift pins
(2) / 20-1283 / Fitting adaptors 1/4 hose x 1/8 NPT
(4) / - / Line shape inside diameter 8.5 / O-Ring IRIDIA Ex version lifter for pin axis point
(12) / AS568-145 / O-Rings perlast G67P AS-145 Semitransparent BTM Electrode IRIDIA G67P
(6) / AS568-151 / O-Rings perlast G67P AS-151 Semitransparent BTM Base IRIDIA G67P
(1) / RR-940-CE / Flow meter display device for chiller DEX-30A
(3) / ARJ310F-N01-03 / Regulator valve for chamber doors
(1) / KQ2L04-M 5 / Female elbow for chamber door
(3) / AQ1500-M5 / Exhaust valve for chamber doors
(2) / KQ2H04-M5 / Joint / One touch joint for chamber doors
(2) / 52-0502-001 / Guide rings
(1) / A35-457-01 / Detector, photo darlington
(1) / 06-2598 (52-0523-001) / Lift pin QUARTZ (Standard +0.5 mm)
(1) / 06-2598 (52-0524-001) / Lift pin QUARTZ (Standard +1 mm)
(1) / 06-2598 ( 52-0525-001 ) / Lift pin QUARTZ (Standard -0.5 mm)
(1) / 06-2598 ( 52-0526-001 ) / Lift pin QUARTZ (Standard -1 mm)
(3) / 52-0520-001 / Pins / Lift pins SAPPHIRE (Standard -1 mm)
(2) / SS-QTM2A-B-400 / Stainless steel PTFE Sealed quick connect body, 0.6 cv, 1/4", Swagelok tube fittings
(9) / 96-3583 / Cable lamp tray to lamp dist boxes
(2) / AP3550S-2PW-MV4-MV4 / Air operation valves, 1/4" male
(3) / ARJ1020F-M5-04 / Pressure regulator for chamber doors
(4) / AS2001F-04 / Speed controllers 4 mm (Chamber door)
(2) / 100991861 / Valves / VLV, LP, 50, ANG, NC, CHEMR550
(8) / DA20X60-5900W / Cylinders / Special cylinders
(3) / NCDGBN40-0050 / Lift pin low side air cylinders
(2) / 38-2695 / Push buttons, non illum, n.c flush
(2) / 38-2691 / Illum, push buttons oper, ext head with full
(2) / AP3550S-2PW-FV4-FV4 / Air open valve for sas boxes
(2) / 06-2632 / Cap isolators QUARTZ for CLTC CAP
(1) / 57-2031 / Special air cylinder lift pin (UP)
(4) / A040-4E1-DC24V / Solenoid valves 4 E1
(1) / 23-2637 / Rotameter with valve 6.5GPH,1/4-FNPT
(2) / None / O-Rings perlast G67P 272.28 mm x 3.6 mm
(3) / None / O-Rings perlast G74P 152.07 mm x 2.8 mm
(4) / AS-214 / O-Rings kalrez 8002 (Applicator T)
(2) / SS-QTM2-D-400 / Stainless steel PTFE Sealed quick connect stem with valves, 0.6 cv, 1/4" Swagelok tube fitting
(1) / UG-932/U / BNC Connector
(1) / WD200EB-00BHF0 / CCV Back up hard disk 20.0 GB
(1) / 51023H2 / CCV Back up hard disk 10.2GB
(1) / QML10000LD-A / CCV Back up hard disk 10.2 GB
(1) / 7587UL1 / System controller IBM
(4) / RFS-4, ON, SUS304 / Float level switches for DEX-30A
(1) / H3CR-A-300 / Timer relay AC100-240/DC100-125
(1) / 61-2309 / Power supply 24 V (Cluster misc controller).
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