Used GLOW RESEARCH AutoGlow #9194105 for sale
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ID: 9194105
Vintage: 2008
Plasma system
Pressure output display
Automatic tuning
Solid state phase
Magnitude detector
Two adjustable flowmeters for two gases
Solid state electronics
Diagnostic LED card
Adjustable power in one watt increments
Electronics control board
RF Matching network
RF Generator
Quartz chamber with gas distribution tube
RF Power applied metal sheet
Ground bottom electrode
Options:
Vacuum pump
Aluminum sample holder
Quartz sample holder
Spare parts kit
Power: 20 to 300 Watts
CE Marked
2008 vintage.
GLOW RESEARCH AutoGlow is an advanced etcher and asher for use in microfabrication and chemical engineering research. The device is capable of performing chemical treatments on substrates with submicron accuracy. Its precise control of temperatures ensures uniformity and repeatability in the etching or annealing process. AutoGlow is designed with a number of innovative elements to enable it to meet the highest industry standards. Its advanced quartz crystal microbalance sensor can accurately monitor and control substrate temperatures in the range of 650-950C. The equipment's advanced power source gives it a more flexible range of operation, allowing for treatments to be run faster or slower, depending on the results required. For added safety during operation, GLOW RESEARCH AutoGlow is equipped with a comprehensive range of protective features. These include a safety shut-off valve to prevent dangerous buildup of gas pressure, as well as a special vacuum system that maintains cleanliness of the process environment. Furthermore, the unit can be supplied with a range of sensors for safety monitoring and data logging. AutoGlow is a powerful, reliable tool that enables its users to perform accurate etching and annealing treatments with a very high degree of accuracy. The machine is also designed to be user-friendly, with a colour touchscreen control panel that makes operation simple. The machine is also fitted with a sophisticated diagnostic tool that allows for quick fault diagnosis and maintenance. In general, GLOW RESEARCH AutoGlow offers the latest in etching and annealing technology, allowing its users to achieve superior accuracy, control and repeatability. Its range of features make it suitable for a wide range of applications, from materials science to chip fabrication. Its ease of use and safety features make it a popular choice for both industrial and educational applications.
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