Used GLOW RESEARCH ST1200 #9151878 for sale
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ID: 9151878
Wafer Size: 10"
RIE system, 10"
DC bias for enhanced ion bombardment and anisotropy
Dark space shield to focus plasma
Variable electrode spacing
Top or bottom electrode power
Digital mass flow controllers
Baratron pressure read back
Throttle valve control
600 watt, 13.56 MHz
Touchscreen control
Multiple step recipes
Monitor process during process
End point solutions
Turbo pump
ICP
Heated chuck
Applications:
FA Applications
Spin on glass (SOG)
PECVD Nitride etch
Descum
Photo resist strip with heater
Contact slope etch
Via etch
BPSG Etch
TEOS Etch
Polyimide
Poly silicon.
GLOW RESEARCH ST1200 is an advanced etching and ashing equipment used for a variety of material processing needs. It is designed with a focus on user safety and environmental protection. The system can be used for both dry ashing and wet etching. This allows for a variety of custom processes to be performed with ST1200. GLOW RESEARCH ST1200 includes an advanced multi-part etching unit utilizing an integrated magnetic stirring mechanism. This allows for the creation of more intricate and specialized shapes and designs on the materials being etched. It also offers the flexibility for a variety of substrate materials to be used in the process. ST1200 is equipped with programmable high- vacuum sensors which monitor the etching process and allow for optimal settings to be programmed for each operation. This feature ensures that all areas of the substrate are treated homogeneously resulting in uniform etching rates and accurate results. The machine is also compatible with a range of optional accessories such as a gloss meter, which allows for accurate measurements of the substrate sheen. One of the most impressive features of GLOW RESEARCH ST1200 is the air-cooled, forced air cooling tool which ensures consistent temperature control during the etching process. This ensures the safety of both peripheral machines and personnel in the vicinity during the etching process. The device is also equipped with a powerful automatic controller which can be programmed with multiple parameters including the type of material being etched, etching time, and cooling rate. This allows for precise control of the etching process for optimal results. Overall, ST1200 is an advanced etching and ashing asset with a focus on safety and environmental protection. It offers a wide range of features which allow for precise control of the etching process to ensure uniform results and the safety of personnel in the vicinity. The device is also highly compatible with a range of optional accessories for additional customization and accuracy.
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