Used GPTC / GRAND PLASTIC TECHNOLOGY CORP 50-300 #293637226 for sale

GPTC / GRAND PLASTIC TECHNOLOGY CORP 50-300
ID: 293637226
Vintage: 2010
Stripper (3) Loadports Chamber 2010 vintage.
GPTC / GRAND PLASTIC TECHNOLOGY CORP 50-300 is a shallow etcher / asher with a wide range of processes, extreme precision and repeatability that can provide up to and beyond 300 nm of patterning on a substrate. The equipment is ideal for etching and ashing process conditions and is designed to produce small feature sizes in a single step. Through its advanced patterning technology, it is able to cover large and small features or areas with an extremely uniform etching or ashing. GPTC 50-300 is a single-step shallow etching and ashing system ideal for processes such as photoresist removal and smoothing. The unit is comprised of a 50 cm x 300 cm frame, which houses four plasma reaction chambers of 25 cm x 50 cm, with a flange interface which is compatible with various types of fixturing assemblies. The frame also includes all necessary machine components, such as plasma source, power supply, controllers, and vacuum pumps. The unique design of GRAND PLASTIC TECHNOLOGY CORP 50-300 allows for the tight control of etching and ashing processes in order to achieve tight tolerance features on the substrate. Its uniform plasma distribution yields exceptional feature homogeneity and resolution with feature verticality and tight linewidth control. With the advanced autocollimator process, the tool can even enable the etching and ashing of dangerous micro-features that require special carefully controlled processing environments without risk of destroying the part. The asset's advanced accessories, such as needle-type plasma nozzles, optical masks with high temperature resistance, and shutter mask, ensures uniform plasma treatment over large areas. 50-300 is also integrated with the advanced fixturing which offers the flexible placement and edge-to-edge processing of the parts while maintaining good repeatability. It can use multiple substrate processing techniques and ex-situ deposition techniques, such as spin coating, proximity coating, evaporation, and sputtering. Additionally, it can use a variety of gas chemistry combinations, such as C2F6/SF6, CF4/O2 and CF4/Ar mixed gases, where the mix ratio can be easily adjusted to achieve the desired process results. In summary, GPTC / GRAND PLASTIC TECHNOLOGY CORP 50-300 etcher-asher is the ideal solution for achieving perfect uniform etching and ashing of plastic parts and other delicate materials without subjecting the part to damage or contaminants. This model offers repeatable and accuracy processes with a high degree of precision, with feature sizes up to and beyond 300 nm. As with all advanced etching and ashing systems, GPTC 50-300 can be operated in manual or automated mode, depending on the user's preference.
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