Used HITACHI DM 421P #9286876 for sale

HITACHI DM 421P is an etcher/asher specifically designed for wafer processing. It features a compact design with four independent process chambers and a simple user interface. The equipment is enclosed with sliding doors to minimize the impact of outside environment on sensitive wafer materials. The system can process up to four wafers simultaneously in a single process cycle. It comes with an easy-to-use production recipe scripting engine, wafer handlers, and a 3-axis linear transfer mechanism. The horizontal process chamber of the unit has a uniform temperature distribution to ensure uniform etching/ashening across the wafer. DM 421P uses a high-precision temperature controller with precise temperature control, enabling superior temperature uniformity and accuracy. Its dry and wet etch capabilities allow process engineers to optimize their recipes to meet their application requirements. The machine is also equipped with an advanced set of automated in-situ electrochemical monitors and sensors to provide real-time process monitoring and feedback. The intelligent transport tool provides efficient handling of wafers while wafer handling commands enable easy and repeatable automation for multiple processes. HITACHI DM 421P also offers several safety features such as inert gas purging, exhaust port closure alarms, and emergency exhaust ports. These features protect operators from exposure to potential contaminants as well as ensuring increased process reproducibility and reliability. DM 421P comes with a comprehensive set of software tools that enable users to optimize recipes and provides detailed history reporting of chamber asset parameters. With these tools, the user can evaluate the effectiveness of their process recipes and the performance of the model. Overall, HITACHI DM 421P is designed to bring high-precision wafer processing capabilities to users, providing well-controlled and reliable performance. It's strong combination of independent chambers, efficient wafer handling, and comprehensive software make it an indispensable tool for any etch and ashing application.