Used HITACHI / KOKUSAI RAM6500 #9251841 for sale

HITACHI / KOKUSAI RAM6500
ID: 9251841
Wafer Size: 6"
Vintage: 1996
Asher, 6" 1996 vintage.
HITACHI / KOKUSAI RAM6500 is a state-of-the-art etcher and asher designed for both industry and research institutions. This market-leading vacuum processing equipment comes with advanced technologies that combine high-precision etching, wafer cutting, and short-time ashing capabilities in a single, user-friendly tool. HITACHI RAM6500 offers an unparalleled level of versatility, due to its integrated design that allows for a variety of recipes in a single operating period. Its advanced features include a temperature control equipment, a wide-ranging process chamber, and a user-friendly interface for easy manipulation of settings. The temperature control system maintains constant process conditions and provides reliable and accurate results. Additionally, the wide-ranging process chamber can accommodate a variety of substrate sizes, from chips up to 200 mm, allowing for greater flexibility and a wider range of application. KOKUSAI RAM6500's user-friendly interface allows the user to save, recall, and modify etching parameters with ease. The tool is also equipped with safety features that warn users if any operating variations occur, thus providing optimum safety. Moreover, RAM6500 provides excellent process repeatability with repeatability score of within ± 0.1 µm, ensuring high accuracy and consistency with each foundry run. The unit is made up of a variety of components, including a controller, an automatic substrate holder, a vacuum chamber, an inert gas delivery machine, an etching tool, and an ashing asset. All of these components work together to implement the user's desired recipe quickly and efficiently. Furthermore, HITACHI / KOKUSAI RAM6500 is capable of etching up to four wafers simultaneously, increasing the efficiency of the process and reducing the overall workload. Overall, HITACHI RAM6500 is an advanced etcher/asher that offers excellent process capabilities, versatility, and ease of operation. Its ability to enable high-precision etching, cutting, and ashing, combined with its user-friendly features, make it an ideal solution for a variety of etching and ashing needs.
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