Used HITACHI M 308AT #9410880 for sale

Manufacturer
HITACHI
Model
M 308AT
ID: 9410880
Wafer Size: 6"
Vintage: 1991
Etcher, 6" Missing parts 1991 vintage.
HITACHI M 308AT is an etcher or asher designed for semiconductor-processing applications. This professional-grade machine features a 30 cm in size that is sure to meet the demands of many industrial users. HITACHI M-308AT has a chamber that is 11" in diameter, with a height of 6.7", making it perfect for clean room operations. It can process up to 8" wafers, supporting both 4" and 8" wafers, allowing you to save space in your operation. M 308 AT also has type 8 processing sequences; which stands for Type A, B, C, and D. Each sequence offers a different purpose and can vary depending on the type of material to be processed. Type A offers uniform etching in a single chamber, while Type B is designed for uniform etching in a dual chamber. Type C is best for selectively etching in the single chamber, while Type D is designed for selectively etching in the dual chamber. Each mode offers uniform, reproducible etching results that you can rely upon. M 308AT also has an automated controller that makes life easier. This allows you to program the processing sequence, specify the wafer loading and unloading, as well as monitor temperatures and set alarms. This control equipment can be connected to your computer to stay informed of operating parameters and to record completed work. It has a powerful software that helps manage the system, allowing you to save and recall recipes. The chamber of M-308AT is also equipped with an inert gas unit that helps to reduce the risk of particles settling on the wafers during the etching process. It is also equipped with a cooling machine that helps to keep the temperature constant during etching. This makes it ideal for dry etch applications that require high precision results. This etcher/asher has nozzles that can hold up to 20 wafers at a time. You can set the spacing of the wafers in the nozzles, so it can accommodate several different types of wafers. This, combined with its low airflow, makes it an ideal all-in-one machine for many processes. HITACHI M 308 AT is designed to work with dry etching processes such as lithography, wet chemical etching, and ion implantation. Thanks to its dual-chamber tool, this machine can also be used with wet etching processes such as Chemical Mechanical Polishing (CMP). This is a reliable, professional-grade machine that is sure to meet all of your etching needs. It is also easy to use, with its automated controller and user-friendly software. HITACHI M 308AT comes with an intuitive and easy to understand user manual that can help with any troubleshooting that you may need.
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