Used HITACHI M 318 #9144927 for sale

HITACHI M 318 is a multi-purpose etching/ asher equipment designed to meet the needs of a variety of applications. This reliable system requires minimal yet versatile operation and maintenance requirements leading to reduced operation costs and improved reliability. M 318 has a process chamber size of 250W x 200D x 200H mm and a maximum source temperature of 1000°C. The unit has been designed with large area uniformity and repeatability capabilities in mind. It features an automated programmable wafer manipulation unit with a motorized chuck, air bearing tables, a vacuum machine, and an electronically controlled substrate temperature sensor. The manipulation of the wafers is facilitated by the adjustable wide range quartz horizontal trays and an electronically driven cantilever arm with integrated end effectors. A computer-controlled generator and vaporization module is integrated in the tool allowing for precision control of deposition rate, temperature, and amount of material deposited. This facilitates the uniform deposition of either simple or multiple layers on the substrate. The computer controls also provide for easy optimization and adjustment of the anodic oxidation and etching parameters. HITACHI M 318 comes with a custom monitor which can be operated through a touch screen and provides a visual monitoring of all parameters. It also features advanced wafer temperature control and a range of programming options, including a variety of end-effector positions, of which include the ability to measure and analyze temperature profiles per wafer, providing a valuable tool for product development. M 318 comes with advanced software, including an automated recipe generator, to facilitate the easy setup of processes. This helps to increase the speed and accuracy of the etching or ashing processes, while also allowing for repeatable process operations. For further reliability, the asset includes a built-in diagnostics model and an internet connection to ensure regular remote monitoring and troubleshooting. For safety, HITACHI M 318 features a built-in exhaust equipment, as well as a comprehensive emergency shut-off button. It also comes with a range of safety equipment such as gas valves, vacuum systems, and air filters. To ensure the robustness of the system, regular maintenance should be carried out to ensure optimal performance. M 318 is a highly reliable and versatile etching/ ashing unit perfect for a range of applications such as the etching of ceramics, dielectrics, polymers, and metals, as well as the ashing or crystal slicing of wafers. Compatible with all thin-film deposition processes, HITACHI M 318 is suitable for both research laboratories and manufacturing operations.