Used HITACHI M 318SX #136432 for sale

HITACHI M 318SX
Manufacturer
HITACHI
Model
M 318SX
ID: 136432
Wafer Size: 8"
Vintage: 1993
Dry etchers, 8", 1993 vintage.
HITACHI M 318SX is a versatile etching and ashing equipment designed to fit into a wide range of laboratory environments. It is perfect for heat-sensitive materials, as it has a high temperature control system which ensures that the specialized form of dry etching and ashing goes as smoothly as possible. The energetic material used in etching is stored in a special chamber, which allows a steady supply of etching agent to come out of the nozzle. This chamber is temperature-controlled by a large fan and cooling unit. The temperature range covers between 500C and 1150C, giving scientists and technicians working with the device the ability to accurately and effectively control their etching or ashing project. M 318SX is equipped with a control panel, LCD display and a host of other features. An array of protective clothing and equipment, such as eye shields and respirators, are a must when using this sophisticated device. It also features an automated safety machine, which monitors the temperature and gas composition, turning off the machine if anything goes awry. When etching, the gas precipitation nozzles acquires its supplies from a high-pressure nitrogen tank. As such, HITACHI M 318SX needs to be connected to a vacuum tool when in use. This ensures the gases used do not reach atmosphere, which is essential as the number of vapors and fumes generated are potentially hazardous. M 318SX can be customized with a range of chamber accessories, such as heating systems and racks, to guarantee the best results possible. To top it off, the nozzles are well designed, offering several etching and ashing parameters, such as temperature, gas flow, and drag. HITACHI M 318SX is an excellent etching and ashing asset for any laboratory that needs a reliable device for heat-sensitive materials. Its simple design and wide range of features make it a great choice for any science project.
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