Used HITACHI M 501 #9161262 for sale

HITACHI M 501 is a light duty, multipurpose etcher/asher that offers excellent performance and reliability in a wide variety of processes. M 501 offers etching and ashing capabilities with a maximum temperature of up to 950°C, with an additional option for up to 1100°C. This combination provides advanced processes such as solar wafer thinning, via hole isolation, and advanced MEMS fabrication. The wafer is placed on a cassette and loaded into the upper chamber of HITACHI M 501, while the lower chamber houses the process gas and the radio-frequency coil. M 501 has a width of 12", a depth of 16", and a height of 14" at 63 lbs. and is designed to fit into most available laboratory space. HITACHI M 501 boasts a suite of internal safety shut-off features, including over-temperature and over-pressure protection. The internal design of M 501 includes three independent graphite-heater blocks and three independent protective chambers for the upper and lower process chambers. HITACHI M 501 runs in either a manual or automatic mode, which is programmable through its own proprietary software. Once the process is initiated, the internal pressure, temperature, and gas flow rate can be monitored and logged from the color LCD touch panel. M 501 sensors also allow for precise temperature and pressure control to ensure consistent etching or ashing of the wafer. HITACHI M 501 also uses self-bias technologies, such as the Heimann etcher, which enables extremely high processing speeds of up to 1200 wafers per hour. This increases the throughput and uniformity of the etching or ashing process. Additionally, the chamber is self-contained, meaning that it is hermetically sealed and does not require a cleanroom to operate. This opens up the possibility of process migrations, as well as allowing M 501 to be used wherever necessary in a variety of different laboratories or industrial settings. Overall, HITACHI M 501 is a reliable and efficient etcher/asher that can be used in a wide variety of applications. Its hermetically sealed design ensures a clean process, and the suite of safety parameters ensures that it can be operated with total peace of mind. With its user friendly controls and advanced features, M 501 is an ideal choice for industrial and laboratory applications alike.