Used HITACHI M 501AWE #9130052 for sale

Manufacturer
HITACHI
Model
M 501AWE
ID: 9130052
Wafer Size: 8"
Vintage: 1997
Metal etchers, 8" 1997 vintage.
HITACHI M 501AWE is a state-of-the-art etcher / asher suitable for both laboratory and industrial applications. This device is designed for high performance etching and allows for a high density of features and increased throughput. M 501AWE has a wide variety of user friendly features which make it an ideal choice for a variety of etching and ashing needs. HITACHI M 501AWE is a versatile machine that has an integrated automatic wafer transportation equipment. This system makes it easy to maneuver the wafer by providing a step-by-step process for the best etching results. The machine also has a range of liquid-jet cleaning capabilities, so that any powder residues on the wafer can be removed. The machine benefits from a two-stage etching process which produces a more uniform etch. The first step is a wet etch or etching in a solution and the second stage is done by dry etching in a plasma or reactive gas. The dual process enables M 501AWE to reduce the formation of defects that may arise during etching. HITACHI M 501AWE can be used for variable angle etching (VAE). VAE provides precise control of the etching process and enables the user to etch structures with angles not vertically or horizontally. This feature is typically used in the fabrication of finely detailed microstructures. The machine has a built-in cooling unit which helps to keep the etching process at a consistent temperature. The wide temperature range available on M 501AWE enables the user to set the etching temperature for most materials. A built-in gas machine also helps to regulate the gas flow for optimal etching efficiency. In addition, HITACHI M 501AWE can be used for precision fine-line etching. This is a process by which a high-precision result is achieved, resulting in greater production accuracy and higher yields. The machine also has an advanced automatic exposure tool which provides consistent and repeatable etching results. Overall, M 501AWE is an excellent etcher and asher suitable for a wide range of industrial and laboratory applications. With its wide range of features and capabilities, it offers a setup that is user-friendly, efficient and provides a high level of control and accuracy.
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