Used HITACHI M 511 #293656260 for sale

HITACHI M 511 etcher/asher is a versatile and robust machine that provides high accuracy and repeatable results for a variety of applications. The etcher/asher is designed to perform precision etching and ashing processes in laboratory and production environments. It is suitable for etching glass, plastics, ceramics, metals, and some composite materials. The etcher/asher can be used for single or multiple layer removal, text etching, pattern etching and thin film ashing. HITACHI M-511 features a state-of-the-art wafer-handling equipment that is highly reliable and flexible. It features a multi-language LCD control panel, a multi-chamber plate with advanced safety features and automatic temperature control. The advanced safety system includes emergency stop and emergency input control. This unit is designed to protect both operators and the etcher/asher from hazardous operations. The etcher/asher also includes a unique self-cleaning machine that eliminates the need to manually clean between operations. M 511 features a capable 3-axis automatic stage with a maximum stage movement of 300 x 300 mm. Its etching/ashing capability is rated for 8" wafers but can etch up to 12" wafers with an optional extension power supply. The machine provides uniformity of process quality and repeatability by optimizing the etch rate for multi-step processes. The etch rate is up to 5-10 nm/min and the etch resolution is up to 1 μm. It also features solvent recovery capability and a waste collection tray. M-511 also boasts a wide range of accessories for customization and versatility. This includes a gas module for gas etching, a sample plate for high-resolution thin film etching, and a pulse laser module for high-speed processing. It also includes a high vacuum port for more demanding applications, and a room temperature processing option. HITACHI M 511 is an ideal solution for laboratories and production facilities that require a reliable and cost-effective etching and ashing tool. With its superior accuracy and repeatability, it is perfect for high-precision etching operations. The machine features a user-friendly interface and includes a variety of advanced safety features. Its accessory options make this machine highly customizable and suitable for a range of applications.