Used HITACHI M 511 #293829872 for sale

HITACHI M 511
Manufacturer
HITACHI
Model
M 511
ID: 293829872
Wafer Size: 8"
Poly silicon etcher, 8".
HITACHI M 511 is a low-power, medium-performance etcher/asher used for chemical and physical etching of various substrates. It is suitable for a wide range of applications in the electronics, semiconductor, and photovoltaic industries. The equipment is widely used in both research and production settings. The main component of the system is the electrostatic etch chamber, in which a low voltage electric field is generated by a powerful magnet. Etching is done through a process of energetic bombardment of ions on the substrate, which are then used to create a desired pattern on the surface. The vacuum inside the chamber optimizes the etching process by increasing the mobility of ions. The advanced control unit of HITACHI M-511 provides precise etching control over various parameters such as the working pressure, flow rate and etch rate. This ensures uniform etching of thin films, making it possible to achieve very high resolutions. The chamber features a stainless steel platen which helps reduce undesired side-wall etching of substrates. The machine also includes a software which provides automatic control of the etching process. It features powerful algorithms which provide an optimal etching profile, controllable parameters such as pulse frequency and pulse duration, and a user-friendly graphical interface. The software also enables users to store up to 10 different etching recipes in its memory. In addition, the tool is also fitted with a gas delivery asset for chemical etching. This allows for safe and precise delivery of different etching gases, such as oxygen, chlorine, and sulfur hexafluoride (SF6). The orifices of the gas delivery model are adjustable to control the gas flow rate. M 511 is a reliable and versatile etcher/asher. It has been designed with user safety in mind, and the advanced control equipment makes it an ideal choice for a wide range of applications in the electronics, semiconductor, and photovoltaic industries.
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