Used HITACHI M 511 #9257744 for sale

HITACHI M 511 is an etcher/asher that is part of HITACHI family of products. It is designed for the etching and ashing of thin substrates. HITACHI M-511 is a multi-channel equipment with four separate etching and/or ashing channels capable of operating independently or simultaneously in order to provide high-throughput processing. It is designed with a vacuum capable of producing as low as 0.01 Torr, allowing for optimal operation in the etching/ashing of thin film materials. M 511 is equipped with component leveling and lane-trimming capabilities to ensure uniformity and a steady flow of electrical current for each wafer. In addition, the system has a film-thickness monitoring unit which automatically compensates for any slight drift of the substrate etch/ash rate. The integrated safety machine prevents over-etching or over-ashing of the substrates to ensure that delicate materials are not damaged during processing. M-511 comes complete with an integrated nitrogen flow controller that helps ensure a safe, efficient processing environment. With its rugged design, HITACHI M 511 can handle up to 150 wafers per hour and is a versatile tool for achieving precise etching and ashing requirements.