Used HITACHI M 511AE #9400299 for sale
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ID: 9400299
Wafer Size: 8"
Etcher, 8"
(3) Cassettes / FOUP Position
SECS II Interface
Metal etch: Microwave ECR (M), UHF ECR (U)
Strip: EMCP Asher
Poly etch: Microwave ECR (M), UHF ECR (U), XT Chamber
Oxide etch: Microwave ECR (M), UHF ECR (U)
Signal lamp tower
No AGV
No OHT
ESC Monopolar
No TM Bias enhancement
EC Turbo molecular pump:
SEIKO SEIKI STP-H2001K2 Controller
DAIHEN ES7 EC Source generator
PEARL CF-500-400K EC Bias generator
(2) EDWARDS iQDP8 Loadlock pumps
EDWARDS iQDP80 Pumps
MYDAX 1VL5WB Chiller
Cooling channels
Gas configuration:
Ar / 300
Cl2 / 500
SF6 / 300
CF4 / 100
HBr / 200
Cl2 / 100
O2 / 40
Power supply: 208 VAC, 50/60 Hz, 3-Phase.
HITACHI M 511AE is an etcher or asphalt scriber equipped with a DC motor for carving and etching imprints on concrete, asphalt and other surfaces. This motor-driven machine performs calibrations and engraving on a variety of materials for marking or making signs. This tool features an electronic speed control system for a higher accuracy level when executing markings and etches of a precise size. The speed can be adjusted from 100 to 12,000 times/minute and an automatic reverse (over speed) control system helps maintain a precise length of the printed marks. HITACHI M 511 AE was designed to allow the user to easily change the depth of the stroke with a depth adjustment knob. This device uses a gear switch to increase or decrease the depth up to 3 millimeters. To ensure a smooth and precise operation, the electric motor that drives this machine is designed with a vibration absorbing mechanism that helps to minimize the noise and vibration created when this machine is used. This machine is equipped with an indicator that displays the various power settings and other information, including the current depth of the groove. In addition, this machine has a soft surface casing with a built-in storage bag for the accessories. Accessories for this machine include a carbon strip set for etching, a abrasive rubber wheel for grinding, and a chuck for easy changing of tools. M 511AE is a versatile machine that works effectively for mark making, slotting, and engraving on a variety of materials, from concrete to asphalt and other surfaces. As its motor is developed to work with a wide range of materials, its speed and status settings can be easily adjusted for different applications. The sleek design ensures that the machine is easy to store and use, and comes with several accessories for various etching tasks.
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