Used HITACHI M 712 #9314719 for sale

HITACHI M 712 is an etcher/asher ideal for use in a wide range of photolithography, metallization, and semiconductor processing applications. The tool features state-of-the-art economic and performance features, including high-precision automated wafer alignment, ultra-high speed throughput, and a wide range of deposition/etching capabilities. The micro-processing system is designed with a maximum wafer size of 8 inches, allowing for high productivity and improved feature precision. The etcher/asher utilizes a two-stage mechanism, which combines free-ion reactive ion etching with chemical assist etching for superior etch quality without detrimental effect of electrical arcing. The dual plasmas guarantee more effective etching of tight geometries with less substrate damage and more uniform etching. The etcher/asher also utilizes a patented split shower plate, J-filing, and vacuum integration to achieve ultra-high etching speed and throughput. The split shower plate helps minimize mask misalignment and offers superior thickness control. J-filing technology minimizes etch development time and allows etching to be performed from the edge. Vacuum integration tightly seals the chamber and reduces contamination from the outside. The system comes with a Windows-based graphical user interface that allows for easy programming and monitoring of recipes. The integrated control functions including ion generation feedback and gas flow status provide accurate process control with high throughput. Moreover, the tool comes with an advanced diagnostics program that continuously monitors system performance and offers data-logging options. In addition, M 712 integrates various safety features including an ion density monitor, temperature sensors, pressure gauges, and pass-through systems. The pressure sensor reports changes in pressure within the chamber and can be used to detect abnormal conditions, while the in-built safety features provide warning signals in the event of an abnormal situation. This ensures a safe and efficient process. Overall, HITACHI M 712 is an ideal etcher/asher for a wide variety of photolithography, metallization, and semiconductor processing applications. Its superior performance and safety features make it a great choice for users who value quality and efficiency.