Used HITACHI M 712E ECR #9172571 for sale
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ID: 9172571
Wafer Size: 8"
Plasma etcher, 8"
Wafer loading module:
(3) Cassette load ports
Four-axes robot
Wafer centering unit: Notch alignment and centering
Fan filter unit
Buffer / Loadlock chamber:
Two-axes robot
Buffer turbo molecular pump
Man / Machine interface:
PC with Magnetic / Optical drive
LCD Display
Keyboard / Pointer
(2) ECR etch chambers
(2) Gas boxes
One per chamber: Ar, Cl2, SF6, HBr, CF4, CHF3, O2, spare
(2) Capacitance manometers
Penning gauge
Microwave power monitor / Auto tuner
Chamber temperature control module
Etch turbo molecular pump
Etch coil magnet: 3-Coil type
Coil cooling water flow sensors
Dual input endpoint detection system
Backside Helium cooling
(2) Power supply units - One per chamber
(2) EC Temperature controllers - One per chamber
Facility interface box
Transformer box
FFB Unit.
HITACHI M 712E ECR is a premium electrochemical etching/ashning (ECR) machine designed for a wide range of applications. The device is compact, easy to operate, and provides high-quality results due to its ability to quickly and accurately etch/ash a wide variety of materials. The machine utilizes a unique multi-axis system that includes a spindle axis, feed axis, and Y-axis. The X, Y, and Z axes are powered by servomotors, while the spindle operates autonomously. The machine is capable of etching/ashing on an array of materials, from plastics and metals to stone, ceramic, and glass. M 712E ECR offers reliable precision and speed. The device comes with an onboard memory for up to five jobs, allowing for easy job recall and fast repetition. This combined with its high-output DC current makes the machine capable of handling challenging etch/ash applications. It features a high-resistivity quartz material which can easily achieve professional-level accuracy, along with a dust cover for reducing dust and debris around the operation area. HITACHI M 712E ECR is incredibly easy to use. It utilizes an intuitive user-friendly interface with a 7" touchscreen display, letting the user adjust the operating parameters with ease. The machine also has an automatic presetting function, ensuring optimal results with minimal operator intervention. It also provides real-time feedback to the operator, making sure they can confirm the quality of their results quickly. M 712E ECR is a cost-effective machine, with an economical cost of operation. It comes with a three-year limited warranty, ensuring that any issues are handled quickly and effectively, giving the user the confidence to operate the machine with minimal downtime. Overall, HITACHI M 712E ECR is an ideal machine for etch/ash applications. Its multi-axis system and high-output DC current make it capable of quick and accurate work, while its intuitive user interface and real-time feedback provide operators with easy job recall and confirmation of results. The device's cost-effective operating costs and three-year warranty make it a smart investment, guaranteeing optimal results.
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